Moxtek, Inc.

Matt Linford

Anubhav Diwan

Stew Nielson

Matthew C George

Fred Lane

Ted Wangensteen

Matthew C George George

A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R)Si(OH)molecule, where each Ris independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R)Si(OH)molecule with the wire grid polarizer and with other (R)Si(OH)molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.

Wire grid polarizer with multi-layer silane conformal coating

A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R)(R)(R). In the above WGP and method, X can be a bond to the ribs; each Rcan be a hydrophobic group; each R, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; Rcan be a silane-reactive-group; and each Rcan be an alkyl group, an aryl group, or combinations thereof.

Wire grid polarizer with silane protective coating

Wire grid polarizer with protective coating

Methods of applying silane coatings

A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from oxidation and/or corrosion. The conformal-coating can include a barrier layer with at least one: of aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, hafnium oxide, and zirconium oxide. A method of making a WGP can include applying the barrier layer over ribs of a WGP by vapor deposition.

Oxidation and moisture barrier layers for wire grid polarizer

A wire grid polarizer (WGP) can have a phosphonate conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a chemical: where Rcan include a hydrophobic group, Z can include a bond to the ribs, and Rcan be any suitable chemical element or group. A method of applying a phosphonate conformal-coating over a WGP can include exposing the WGP to (R)PO(R)(R), where: i is 1 or 2, j is 1 or 2, k is 0 or 1, and i+j+k=3; each Rcan independently include a hydrophobic group; Rcan include a phosphonate-reactive-group; each Rcan independently include an alkyl group, an aryl group, or combinations thereof; and each R, if any, can independently be any suitable chemical element or group.

Wire grid polarizer with phosphonate protective coating

A wire grid polarizer (WGP) can have a phosphonate conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a chemical: where Rcan include a hydrophobic group, Z can be a bond to the ribs, and Rcan be any suitable chemical element or group. A method of applying a phosphonate conformal-coating over a WGP can include exposing the WGP to (R)PO(R)(R), where: i is 1 or 2, j is 1 or 2, k is 0 or 1, and i+j+k=3; each Rcan independently be a hydrophobic group; Rcan be a phosphonate-reactive-group; each Rcan independently be an alkyl group, an aryl group, or combinations thereof; and each R, if any, can independently be any suitable chemical element or group.

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Orem, UT, United States of America

Matt Linford