Kla-tencor Technologies Corporation

Kla Tencor Corporation

Matt Hankinson

Ady Levy

Kyle A Brown

Suresh Lakkapragada

Walter Dean Mieher

Chris Mack

Joseph J Bendik

Methods and systems for evaluating and controlling a lithography process are provided. For example, a method for reducing within wafer variation of a critical metric of a lithography process may include measuring at least one property of a resist disposed upon a wafer during the lithography process. A critical metric of a lithography process may include, but may not be limited to, a critical dimension of a feature formed during the lithography process. The method may also include altering at least one parameter of a process module configured to perform a step of the lithography process to reduce within wafer variation of the critical metric. The parameter of the process module may be altered in response to at least the one measured property of the resist.

Methods and systems for lithography process control

A method for determining one or more process parameter settings of a photolithographic system is disclosed.

Method for process optimization and control by comparison between 2 or more measured scatterometry signals

A method for controlling the variation in process parameters using test structures sensitized to process parameter changes. Wavefront engineering techniques are used to make features of the test structure more sensitive to process changes. Focus and exposure parameters are adjusted in response to the measurements of the test structures. In another embodiment, the wavefront engineering features are placed to permit the test structure appearing on the reticle out of focus. The wavefront engineering feature is an OPC technique applied to the test structure to modify it. The OPC features are applied in an asymmetrical manner to the test structure and enable identifying the direction of process focus changes.

Method and apparatus for the production of process sensitive lithographic features

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San Jose, CA, United States of America

Matt Hankinson