Nitto-denko Corporation

Matsuro Kinbara

Kazuhiro Noda

Shigeji Kuroda

Akira Ishihara

Kohji Maruyama

Kenji Nonomura

Toshiyuki Sekido

An electrode structure containing plural electrode elements each comprising an electrode and an electrolyte layer laminated thereon, the electrode of each electrode element being connected to a power supply and the electrolyte layer to be in contact with the skin, wherein the plural electrode elements are insulated from each other and the electrode of each element is electrically connected to a resistor that limits the current flowing through this electrode, the resistor having a resistance that is &frac15;-5 times the resistance of the skin. The present invention provides an electrode structure capable of making the density of the current flowing to the skin constant, irrespective of the electrification method, and capable of reducing irritation due to the electrification.

Electrode structure for reducing irritation to the skin

A semiconductor wafer processing system having a plurality of processing devices forming a base processing line for processing in sequence a workpiece having a semiconductor wafer is provided with an auxiliary loader connected to one of the processing devices for supplying the workpiece forming a processing line different from the base processing line, and an auxiliary unloader connected to the one processing device for receiving the workpiece processed by the one processing device at times when the one processing device is not supplied the workpiece by the processing device upstream of the one processing device in the base processing line.

Semiconductor wafer processing system

A multiple error processor in an automatic work handling apparatus includes controlling a number of operating mechanisms individually by the operation of control devices corresponding thereto. The operating mechanisms are controlled to stop for errors arising thereon according to stop mode data which corresponds to the errors. The operating mechanisms are controlled to restart-up according to restart-up data corresponding to a first generated error and also for ensuing errors occurring after the first error and before all of the operating mechanisms come to a stop. The errors are stored in an error code memory in an error recovery device.

Growing community of inventors

Osaka, Japan

Matsuro Kinbara