Commissariat a L'energie Atomique Et Aux Energies Alternatives

Mathilde Cartier

Jean Brun

Bertrand Delaet

Marie-Claire Cyrille

Bruno Fain

Emmanuel Arene

Marie- Claire Cyrille

Pierre Descours

Julie Haguet

A method for manufacturing a microelectronic device with a membrane suspended above at least one final cavity, may involve providing a supporting substrate having at least one elementary cavity, and a donor substrate. The method may include assembling the supporting and donor substrate, then thinning the donor substrate so as to form the membrane. Advantageously, the method may include forming at least one membrane anchoring pillar. After the forming of the at least one anchoring pillar, and after the assembling, the method may include etching the surface layer of the supporting substrate so as to widen the at least one elementary cavity, to form the final cavity, the etching being configured to selectively etch the surface layer with respect to the anchoring pillar.

Method for manufacturing a microelectronic device comprising a membrane suspended above a cavity

A permanent magnet includes at least two antiferromagnetic layers and at least two first ferromagnetic layers. A magnetization direction of each first ferromagnetic layer is set, by an exchange coupling, with one of the antiferromagnetic layers of the stack, parallel to and in the same direction as the magnetization directions of the other first ferromagnetic layers. The permanent magnet also includes at least one second ferromagnetic layer. A magnetization direction of each second ferromagnetic layer is pinned only by RKKY (Ruderman-Kittel-Kasuya-Yosida) coupling with at least one of the first ferromagnetic layers or with at least one other of the second ferromagnetic layers.

Permanent magnet comprising a stack of ferromagnetic and antiferromagnetic layers

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Grenoble, France

Mathilde Cartier