Nanoworld Ag

Mathieu Burri

Manfred Detterbeck

Terunobu Akiyama

Stefan Lutter

Thomas Sulzbach

Christoph Richter

Oliver Krause

Bernd Irmer

Christian Penzkofer

Theo Hartmann

Laure Aeschimann

Hans-Juergen Luedge

A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.

Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip

A micro device comprising a SU-8 photoresist layer adhered to a thin layer of, for example, silicon nitride, silicon oxide, metal, and diamond. The SU-8 layer is clamped on the thin layer by using an under-etching technique.

Micro device and process for producing it

Growing community of inventors

Erlach, Switzerland

Mathieu Burri