Siemens Aktiengesellschaft

Mathias Link

Reinhard Gabl

Matthias Schreiter

Jan Weber

Mattias Schreiter

A capacitor structure includes a lower electrode layer disposed on a substrate, an upper electrode layer and a crystalline zinc oxide-containing dielectric layer interposed between the electrode layers. The amorphous dielectric intermediate layer is interposed between the lower electrode layer and the crystalline zinc oxide-containing dielectric layer. A method for producing the aforementioned capacitor structure is also disclosed. The amorphous dielectric layer is adapted to produce during deposition of the zinc oxide an electrical field which is tipped in relation to the normal to the surface of the substrate surface or the lower electrode layer. The zinc oxide monocrystals grow at an angle, thereby providing a crystalline dielectric layer that can be induced to shear vibrations.

Piezo-acoustic thin film resonator having a crystalline zinc oxide layer

In a method for production of a polycrystalline ceramic film on a substrate: a) the substrate is prepared with the substrate surface and preparation of at least one source for the ceramic particles of the ceramic film and b) a particle stream of the ceramic particles is generated from the source of ceramic particles in the direction of the substrate surface on the substrate, with deposition of the ceramic particles on the substrate surface on the substrate with formation of the ceramic film. At least one screen is arranged within the gap, for adjusting an average incidence angle of the ceramic particles relative to a plane normal of the substrate surface, such that the ceramic particles are deposited on the substrate surface at a preferred direction and a relative position of the substrate surface and the screen is altered while the gap remains essentially the same.

Method for producing a polycrystalline ceramic film on a substrate using a shutter

An apparatus having a device for moving a liquid comprises a piezoacoustic resonator element () having at least one piezoelectric layer () and two electrodes (and) present on the piezoelectric layer (). The piezoacoustic resonator element () is designed such that, owing to a voltage being applied to the piezoelectric layer () by means of the electrodes (or), a volume oscillation of the piezoelectric layer () is excited at a resonant frequency. The piezoelectric resonator element () can be acoustically coupled in a suitable manner to a liquid for the purpose of transmitting the excited oscillation into the liquid for the purpose of moving the liquid. The apparatus may be in the form of a micromixer or in the form of a micropump and may comprise, in addition, sensor elements () for detecting the attachment of substance.

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Munich, Germany

Mathias Link