Carl Zeiss Smt Gmbh

Mathias Huesing

Burkhard Corves

Jens Kugler

Bernhard Geuppert

Stefan Hembacher

Martin Riedel

Marwène Nefzi

Michaela Schmid

Taoufik Mbarek

Martin Wahle

Michael Lorenz

Tim Detert

Ivan Ivanov

An optical imaging arrangement includes an optical element unit, and an actuator device connected to the optical element unit and is configured to be connected to a support structure for supporting the optical unit. The actuator device is configured to: actively adjust, in an adjustment state, a position and/or an orientation of the optical unit with respect to the support structure in N degrees of freedom; and support the optical element unit in a statically overdetermined manner in at least one of the N degrees of freedom via a plurality of active first and second actuator components such that, in a holding state following the adjustment state, the first and second actuator components cause a parasitic residual load introduced into the optical element unit in the at least one of the N degrees of freedom.

Optical imaging arrangement with a piezoelectric device

An optical module, in particular for microlithography, includes an optical element and a support unit. The optical element has at least one optically utilized area, which defines a rotational axis of symmetry. To support the optical element the support unit has a plurality of more than three support elements. Each of the support elements in the area of a first end is connected with the optical element and in the area of a second end is connected with the support structure. The support unit is designed such that the degree of freedom of rotation of the optical element around the rotational axis of symmetry is restricted, while the position or orientation of the optical element in the other five degrees of freedom is spatially adjustable via the support unit.

Optical module with an adjustable optical element

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Aachen, Germany

Mathias Huesing