Lam Research Corporation

Mathias Fecher

Timothy M Ebel

A method for simultaneously stripping a photoresist mask employed for etching, in a low pressure, high density plasma processing chamber, a contact hole through an oxide layer to a silicon layer of a substrate and soft etching a surface of the silicon layer at a bottom of the contact hole. The technique of simultaneously stripping and soft etching is configured to substantially remove the photoresist mask and reducing a contact resistance at the bottom of the contact hole simultaneously. The method includes flowing an etchant source gas comprising a fluorocarbon and O,into the plasma processing chamber after the contact hole is formed but prior to filling the contact hole with a substantially conductive material. There is also included forming a plasma from the etchant source gas. Additionally, there is included employing the plasma for simultaneously stripping and soft etching for a predefined duration sufficient to lower a contact resistance between the silicon substrate and the substantially conductive material that is subsequently deposited into the contact hole to a predefined acceptable level.

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Oberpframmern, Germany

Mathias Fecher