Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (1 from 3,785 patents)
1 patent:
1. 12300463 - Method and system for automated frequency tuning of radiofrequency (RF) signal generator for multi-level RF power pulsing