Average Co-Inventor Count = 4.29
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asml Netherlands B.v. (5 from 4,896 patents)
5 patents:
1. 11690159 - Apparatus and method for extending target material delivery system lifetime
2. 11013096 - System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
3. 10477662 - System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
4. 10362664 - System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector
5. 9888554 - System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector