Robert Boschgmbh

Mate Erdosi

Thomas Friedrich

Volkmar Senz

Raschid Baraki

Sophielouise Mach

A micromechanical component. The micromechanical component includes: a substrate; a frame structure which frames a partial surface of the substrate and/or an interlayer applied to the substrate, at least one electrode being mounted on the framed partial surface and/or interlayer; a pressure-sensitive membrane on which an external pressure acts and which brings about a deformation, wherein a self-supporting area of the membrane spans the framed partial surface and/or interlayer, the self-supporting area having at least one movable counterelectrode directed toward the framed partial surface and/or interlayer; and a sealed cavity having a reference pressure, surrounded by the membrane and the frame structure; wherein the self-supporting area of the membrane has local reinforcement structures for increasing a membrane thickness of the self-supporting area, the local reinforcement structures being mounted in particular regions of the self-supporting area where the membrane thickness of the self-supporting area changes.

Micromechanical component for a capacitive pressure sensor device, capacitive pressure sensor device, and a manufacturing method for a capacitive pressure sensor device

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Dunakeszi, Hungary

Mate Erdosi