Ebara Corporation

Masumi Nishijima

Hiroshi Ishikawa

Koichi Takeda

Tomoatsu Ishibashi

Kenichiro Saito

Ryuichi Kosuge

Tomohiro Tanaka

Kunimasa Matsushita

Provided is a substrate cleaning device, an abnormality determination method of a substrate cleaning device, and an abnormality determination program of a substrate cleaning device for determining whether there is an abnormality in a roll cleaning member that is attached. A substrate cleaning device includes: a holder to which a roll cleaning member for cleaning a substrate is attached in a detachable manner; a rotation device which makes the roll cleaning member attached to the holder rotate; a sensor which measures information concerning a vibration of the roll cleaning member during rotation; and a control device which determines, based on a measurement result of the sensor, whether there is an abnormality in the roll cleaning member attached to the holder.

Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium

According to one embodiment of the present disclosure, provided is a substrate cleaning method that performs an operation, in a state where a cleaning member is in contact with a rotating substrate, the cleaning member is moved between a first position on the substrate and a second position close to an edge of the substrate, n times (n is an integer of 2 or more), wherein a controller, which controls a driver that moves the cleaning member, controls the driver to perform an edge cleaning step to perform cleaning of the substrate in a state where the cleaning member is in contact with the second position on the substrate for a predetermined period of time after the cleaning member reaches the second position at least in one operation of the first to the (n-1)th operations.

Substrate cleaning method and substrate cleaning apparatus

A substrate processing apparatus includes transport mechanismstoa sensorfor detecting whether a wafer W is held by the transport mechanismstoa sensor controllerfor controlling the sensora position information acquiring partfor acquiring position information of the substrate W in the transport passage, a detection result acquiring partfor acquiring a detection result from the sensorand a determination processorfor determining whether the detection result of the sensor and the position information are consistent with each other. When it is determined that the detection result of the sensoris inconsistent with the position information, the sensor controllermakes the sensorretry to detect whether the substrate W is held.

Substrate processing apparatus and substrate presence or absence checking method and program

Growing community of inventors

Tokyo, Japan

Masumi Nishijima