Hitachi-high-technologies Corporation

Hitachi High-tech Corporation

Masazumi Tone

Hiroyuki Takahashi

Wen Zheng Li

Shinichi Murakami

Hiroshi Touda

Fujio Onishi

In a charged particle beam control device, irradiation accuracy of an electron beam can be prevented from deteriorating due to a variation in a ground potential. A current control circuit () includes a current conversion unit () that supplies a constant current (Id) by adjusting an amount of a current flowing through a current detection resistor (R) based on a control signal (V), a differential amplification unit () to which a voltage of a first ground side terminal (G) of the control signal and a voltage of a second ground side terminal (G) of the current detection resistor (R) are input, and that outputs an output signal (V) proportional to a voltage difference between the voltage of the first ground side terminal (G) and the voltage of the second ground side terminal (G), and a correction unit () to which the output signal (V) output from the differential amplification unit () and the control signal (V) are input, and that adds the output signal (V) to the control signal (V) at a predetermined ratio.

Charged particle beam control device

In a charged particle apparatus with an ion pump, which is a charged particle beam apparatus with an ion pump including a charged particle beam irradiation detecting unit for irradiating a sample with a charged particle beam in a chamber and detecting a secondary charged particle, an image processing unit for forming a secondary charged particle image from a detection signal of the detected secondary charged particle, an output unit for processing at the image processing unit and outputting an image, an ion pump for maintaining the interior of the processing chamber in a vacuum state, a driving power supply unit of the ion pump, and a high voltage cable for connecting the ion pump and the driving power supply unit, the driving power supply unit of the ion pump is structured to include a high voltage power supply circuit unit for operating the ion pump, a load current detection circuit unit for detecting a load current applied to the ion pump, and a canceller circuit unit for reducing low frequency noise applied to the load current detection circuit unit in order to sufficiently reduce low frequency noise of the power supply of the ion and to measure the degree of vacuum with a high accuracy.

Charged particle beam device provided with ion pump

Growing community of inventors

Tokyo, Japan

Masazumi Tone