Kabushiki Kaisha Toshiba

Kabushiki Kaisha Topcon

Masayuki Sekimura

Akihiro Koga

Akihiro Kasahara

Takao Ohmi

Tomoko Taguchi

Shinji Takakura

Takehito Yamada

Koji Asakawa

Akio Nakagawa

Hideyuki Funaki

Ichiro Omura

Tadashi Sakai

Kei Masunishi

Kenji Sano

Makoto Asakura

Kenji Todori

Shigeru Machida

Akio Kobayashi

Hiroyuki Kawashima

Minoru Yonezawa

Toshikatsu Akiba

Taeko I Urano

Akinori Hongu

Yutaka Majima

Yoriyuki Ishibashi

Shunji Shirouzu

Yasuo Motegi

Hirotake Maruyama

Kiyotaka Uchimaru

Mastoshi Hirono

It is made possible to improve the variations in the 'generated force (load)&#x2014;deflection characteristics'. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

Deformable mirror device and apparatus for observing retina of eye

The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second substrates having first and second stator electrodes formed thereon, respectively, and a movable section arranged between the first and second stator electrodes. The movable section has first and second surfaces that are positioned to face the first and second stator electrodes, respectively. In first and second moving modes, the movable section is slightly moved between the first and second substrates in response to the signal voltage from the driving circuit. Also, in the holding mode, the movable section is held by one of the first and second stator electrodes and, under this condition, at least one of the stator electrode holding the movable section and the movable section held by the stator electrode is left electrically floating.

Electrostatic actuator including a switching circuit which selectively sets one of a moving mode and first and second holding modes and driving method therefor

A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.

Electrostatic actuator and method of driving the same

An optical disk drive having an optical disk that permits transmission of a laser beam, an optical disk holding mechanism configured to rotatably support the optical disk, a first laser beam irradiation mechanism disposed on one side of the optical disk, causing the first laser beam to be vertically incident on one surface of the optical disk, and a first evanescent optical system disposed on the other side of the optical disk. The first evanescent optical system is configured to receive the first laser beam which emanates from the laser beam irradiation mechanism and passes through the optical disk, and radiate the first evanescent wave to the other surface of the optical disk having at least one recording surface.

Optical disk drive

Conventional methods of forming a (111)-plane into a 45-degree-surface have employed a silicon wafer which requires a high processing cost, and methods utilizing an inexpensive (100) silicon wafer have not been successful in forming a 45-degree-surface having sufficient flatness. There is provided a method for manufacturing a semiconductor device preparing a substrate made of the (100) silicon wafer including steps of preparing a substrate made of the (100) silicon wafer, forming a pattern along a <100> direction of the (100) silicon, and etching with an anisotropic etchant using the pattern while applying an ultrasonic wave.

Method for manufacturing a functional device by forming 45-degree-surface on (100) silicon

A data storage apparatus (HDD unit) having a cartridge, attachable to and detachable from a personal computer, incorporating a recording disk, comprises a switch circuit for inhibiting data reading and writing with respect to a magnetic disk and a locking mechanism for detecting that the cartridge is detached from the personal computer and causing data reading and writing inhibiting means to operate in response to the detection.

Data storage apparatus having an impact detecting mechanism

A data storage apparatus (HDD unit) having a cartridge, attachable to and detachable from a personal computer, incorporating a recording disk, comprises a switch circuit for inhibiting data reading and writing with respect to a magnetic disk and a locking mechanism for detecting that the cartridge is detached from the personal computer and causing a data reading and writing inhibiting device to operate in response to the detection.

Data storage apparatus

An optical disk drive has a drive unit for driving a disk and an optical head for focusing a laser beam onto the disk. The optical head has a light source for emitting the laser beam, a galvanomirror for correcting a light passage of the emitted laser beam, and a lens for focusing the laser beam from the galvanomirror onto the disk. The galvanomirror has a rocking portion being electrically chargeable, and one surface of the rocking portion having a reflection surface for reflecting the laser beam. The rocking portion is rockably supported by first end portions of supporting portions. Second end portions of the supporting portions are connected to a second plate (fixing portion). The second plate has an opposed portion opposed to the other surface of the rocking portion with a predetermined gap interposed. Electrically chargeable electrodes are provided on the opposed portion of the second plate, for electrostatically driving the rocking portion thereby reflecting the laser beam at a desired angle. The other surface of the rocking portion is provided with recess portions for reducing an air pressure caused when the rocking portion is rocked.

Galvanomirror and optical disk drive using the same

A liquid crystal display device comprises two substrates opposed to each other, a comb-shaped wall electrode formed to correspond to each pixel of an array defined by vertical and horizontal wires formed on the substrate, the comb-shaped wall electrode having a plurality of elemental electrodes, major surfaces of each of the elemental electrodes being substantially perpendicular to the surfaces of the two substrates, and the major surfaces of adjacent ones of the elemental electrodes constituting counter electrodes to each other, and a liquid crystal filled in a gap of the comb-shaped wall electrode provided between the two substrates.

Reflection type liquid crystal display device having comb-shaped wall

A high-resistant p-silicon layer is formed on a silicon substrate through a silicon oxide film. N-source and n-drain layers are selectively formed in the surface of the high-resistant p-silicon layer. A gate electrode is formed through a gate insulating film on a channel region between the source and drain layers. To induce an n-inverted layer under the gate electrode, a p-base layer is formed in the high-resistant p-silicon layer. A depletion layer extending from a pn junction between the n-drain layer and the high-resistant p-silicon layer reaches the silicon oxide film in a thermal equilibrium state. Part of the high-resistant p-silicon layer extends into a channel region between the drain and base layers. The drain and base layers are connected to each other through part of the depletion layer in the thermal equilibrium state. A field effect transistor having a high-speed operation is provided.

Field effect transistor

A capacitive pressure sensor includes a set of facing electrodes arranged with a cavity disposed therebetween and having insulation layers respectively formed on the surfaces thereof. The contact area between the facing electrodes varies directly with the applied pressure, and variation in the contact area causes variation in the capacitance which is detected as a pressure measurement. Since the capacitance variation is proportional to the applied pressure, a pressure signal which is substantially linear can be obtained. Therefore, the capacitive pressure sensor of this invention can measure pressure with high precision.

Capacitive pressure sensor

Disclosed is a semiconductor flow detector, comprising a semiconductor flow detecting element including a heating element and a pair of temperature-measuring elements formed in the substrate, a detecting element for detecting the temperature of the fluid under measurement, a first driving circuit for heating the heating element to keep the temperature of the semiconductor flow detecting element higher by a prescribed level than the temperature of the fluid under measurement, an electric power detection circuit for detecting the electric power flowing through the heating element so as to generate an electric power detection signal, a second driving circuit for driving the pair of the temperature-measuring elements, a temperature difference detecting circuit for detecting the temperature difference between the pair of the temperature-measuring elements so as to generate a temperature difference signal, and an arithmetic circuit for performing prescribed arithmetic operations among the electric power detection signal and the temperature difference signal so as to determine the flow rate and flowing direction of the fluid.

Growing community of inventors

Chofu, Japan

Masayuki Sekimura