Kawasaki Jukogyo Kabushiki Kaisha

Masayuki Saito

Hirohiko Goto

Takayuki Fukushima

Takahiro Inada

Takeshi Shibata

Isao Kato

Iori Kurata

A substrate conveying robot has left and right arms having a common pivot axis line, an arm drive unit for driving the left and right arms, and a control unit for controlling the arm drive unit. A pulley ratio between a turning pulley, a first pulley, a second pulley, and a third pulley is set so that a moving locus of the substrate holding members when the first link member is rotated about the pivot axis line by the first drive portion so as to extend and contract the arm in a state that the turning pulley is fixed is substantially linear. Thereby, the moving locus of the substrate holding member when extending and contracting the arm can be substantially linear.

Substrate conveying robot and method of operating the same

A seal belt includes inner and outer belt sections. The inner belt section revolves according to the movable member movement. The outer belt section includes, between the inner belt section and an opening, a first portion in which a first end is retained at a movable member inside section portion, the portion being closer to the opening lower end, and the remaining portion extends along the opening and is retained at a third space position, and a second portion in which a first end is retained at an inside section portion, the portion being closer to the lower end, and the remaining portion extends to a fourth space position along the opening and is retained at the fourth space position. The first portion and second portions lengths are changed in a complementary manner according to the movable member movement. The drive mechanism is surrounded by the inner belt section.

Robot with inner and outer belt sections

Growing community of inventors

Kobe, Japan

Masayuki Saito