Hitachi Techno Engineering Co., Ltd.

Masayuki Saito

Haruo Mishina

Tomio Yoneda

Shigeru Ishida

Yukihiro Kawasumi

Hiroshi Tsutsumi

A paste applicator for drawing a paste film in a desired pattern on a substrate, including a table for detachably supporting a substrate, a paste reservoir tube to be filled with a paste, and a nozzle communicating with the paste reservoir and having a paste discharging port opposing to an upper surface of the substrate mounted on the table. A device is supplied for changing the relative positional relationship between the nozzle and the substrate mounted on the table. The paste is applied onto the substrate to form a desired pattern of the paste. A measuring device measures a position of a paste discharging port of a nozzle exchanged together with the paste reservoir tube by using a paste pattern formed by applying the paste onto the substrate held on the table using the exchanged nozzle. The center of the paste pattern nearly agrees with the center of the paste discharging port. A calculator calculates a positional displacement of the paste discharging port due to the nozzle exchange using the measured result obtained by the measuring device. A positioning device positions the substrate at a desired position with respect to the paste discharging port after nozzle exchange using the result obtained by the calculator.

Growing community of inventors

Ina-machi, Japan

Masayuki Saito