Texas Instruments Corporation

Masayuki Moroi

Yoichi Miyai

Katsushi Boku

Toshiyuki Nagata

Hiroyuki Yoshida

Katsuyoshi Andoh

Atsushi Satoh

In a DRAM array using a capacitor-under-bitline (CUB) layout, the plate layer of the capacitor is significantly reduced in area to reduce misalignments in connections between the bitline and the underlying transistors.

Reduced size plate layer improves misalignments for CUB DRAM

An open can-type stacked capacitor is fabricated by forming a conductive layer ( ) outwardly of a substantially uneven surface ( ). A step ( ) is formed in an outer surface ( ) of the conductive layer ( ). A base ( ) of a first electrode ( ) is formed by removing a predetermined thickness ( ) of at least part of the conductive layer ( ). The base ( ) is made of a portion of the conductive layer ( ) underlying the step ( ) by the predetermined thickness ( ). A sidewall ( ) of the first electrode ( ) is formed. A dielectric layer ( ) is formed outwardly of the first electrode ( ). A second electrode ( ) of the capacitor is formed outwardly of the dielectric layer ( ).

Method for fabricating an open can-type stacked capacitor on an uneven surface

An open can-type stacked capacitor is fabricated by forming a conductive layer (,) outwardly of a substantially uneven surface (,). A step (,) is formed in an outer surface (,) of the conductive layer (,). A base (,) of a first electrode (,) is formed by removing a predetermined thickness (,) of at least part of the conductive layer (,). The base (,) is made of a portion of the conductive layer (,) underlying the step (,) by the predetermined thickness (,). A sidewall (,) of the first electrode (,) is formed. A dielectric layer (,) is formed outwardly of the first electrode (,). A second electrode (,) of the capacitor is formed outwardly of the dielectric layer (,).

An open can-type stacked capacitor is fabricated on local topology by forming a conductive layer (,) outwardly of an insulator (,) and an access line (,) extending from the insulator (,). A mask (,) is formed outwardly of the conductive layer (,). A first electrode (,) is formed by removing at least part of the conductive layer (,) exposed by the mask (,). The first electrode (,) includes an annular sidewall (,) having a first segment (,) disposed on the insulator (,) and a second, opposite segment (,) disposed on the access line (,). A dielectric layer (,) is formed outwardly of the first electrode (,). A second electrode (,) is formed outwardly of the dielectric layer (,).

Method for fabrication an open can-type stacked capacitor on local topology

A DRAM uses arcuate moats 18 and wavy bit lines 28, 30 for the array of memory cells. A bit line contact 20 occurs at the apex of the moat and storage node contacts 22, 24 occur at the ends of legs 40, 42 extending from the apex. The wavy bit lines have alternating crests 32, 36 and troughs 34, 38. The bit lines are arranged over the moats with the troughs of each bit line overlying and contacting the apexes of each moat and the crests avoiding any moat. The crests and troughs of the bit lines are offset from one another. In a half-pitch pattern, the troughs of one bit line lie adjacent to the crests of the next bit line. The moats are concave between the legs and the angle between the legs is between about 140 and 170 degrees. The angle between the crests and troughs of the bit lines is between about 110 and 160 degrees. In one embodiment, the central portion 70 between the areas surrounding the storage node contacts is about 10% wider than the areas surrounding the storage node contacts.

DRAM COB bit line and moat arrangement

A device having a circled array of tapered motor driven rollers center and find the flat edge of a semiconductor wafer by rotating the wafer until the flat edge is over a photo cell, at which time finder rollers secure the wafer in its centered and orientated position.

Semiconductor wafer orientation device

The invention is a device for picking-up a semiconductor wafer without using the edges of the wafer thereby eliminating stress to the wafer. The picker moves up and down within a robotic arm and comes to rest in the same location each time through the use of tapered posts.

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Richardson, TX, United States of America

Masayuki Moroi