Sumitomo Osaka Cement Co., Ltd.

Masayuki Ishizuka

Shintaro Hayashi

Kazuto Ando

Takao Kitagawa

Nobuhiro Hidaka

Hiroaki Nagatomo

Kazunori Endou

Masayuki Hashimoto

Tsuyoshi Nagata

Hirokuni Kugimoto

A dielectric material includes a composite sintered body in which conductive particles are dispersed in an insulating material, in which a dielectric constant at a frequency of 40 Hz is 10 or higher, and a difference between a maximum dielectric loss value and a minimum dielectric loss value at a frequency of 1 MHz in a surface of the composite sintered body is 0.002 or less.

Dielectric material and electrostatic chucking device

Provided is a ceramic member in which the difference in thermal expansion coefficient between an insulating ceramic material and an electrically conductive ceramic material is extremely small and therefore any mismatch caused in association with this difference in thermal expansion coefficient does not occur, and which does not undergo any failure such as breakage, cracking, detachment or destruction. The ceramic member () includes an electrically conductive ceramic material () which contains yttrium oxide as the main component and additionally contains a fibrous electrically conductive substance such as carbon nanotubes in an amount of 0.1 to 3 vol % inclusive and an insulation ceramic material () which contains yttrium oxide as the main component, wherein the electrically conductive ceramic material () and the insulation ceramic material () are adhered to each other in an integrated manner through an adhesive layer () which includes an inorganic adhesive material.

Ceramic member

Provided is a sintered object which has excellent resistance to corrosion by corrosive halogen gases and by the plasmas thereof and has excellent thermal conductivity and excellent electrical conductivity. The sintered object has few limitations on design, is usable in a wide range of applications, and is highly versatile. The sintered object has no frequency dependence when a high-frequency voltage is applied thereto and with which it is possible to actualize the stability of a plasma. Also provided is a method for producing the sintered object. Furthermore provided is a high-frequency transmission material which has direct-current electrical conductivity for reducing fluctuations in plasma potential and has capacitive properties that enable the material to transmit high-frequency power necessary for plasma excitation, and which has no fear of causing contamination of a sample with a metal and has resistance to corrosion by plasmas.

Sintered objects and processes for producing same

Nickel-iron-zinc alloy nanoparticles of the present invention are in the form of tabular particles having a thickness of 1 &#x3bc;m or less and an aspect ratio of 2 or more, wherein the (220) plane which is the crystal plane of the face-centered cubic lattice is oriented on the tabular surface of the particles.

Nickel-iron-zinc alloy nanoparticles

The present invention provides a heating apparatus that displays a high heating efficiency and a long product life. In addition, present invention provides a heating apparatus that has no limitations with respect to the materials comprising its heat insulating material, which displays an even greater product life and, moreover, can be manufactured easily at low cost. This heating apparatus is characterized in comprising: a loading plate on which an object to be heated is placed; a support plate that is integrated into a single body with the loading plate; a heating element that is sandwiched in between the loading plate and the support plate; and at least one pair of electrodes, one terminal of which is connected to the aforementioned heating element; wherein, the aforementioned loading plate and support plate each respectively comprises a ceramics sintered body, such that the coefficient of thermal conductivity of the ceramics sintered body comprising the loading plate is greater than the coefficient of thermal conductivity of the ceramics sintered body comprising the support plate. In addition, a heat insulating material may be installed at the base of at least the aforementioned heating element.

Growing community of inventors

Tokyo, Japan

Masayuki Ishizuka