Fujikin Inc.

Tokushima University

Masayoshi Kawashima

Nobukazu Ikeda

Kouji Nishino

Masaaki Nagase

Michio Yamaji

Yoshihiro Deguchi

Masahiko Takimoto

Kazuteru Tanaka

Kaoru Hirata

Katsuyuki Sugita

Satoru Yamashita

Takahiro Imai

A control unitof a flow rate control systemcomprises: a recording unitfor recording measured values of a pressure sensor P and a temperature sensor T, a storage unitfor storing volume data between a first valve Vand a second valve Vcorresponding to the measured value of the pressure sensor P, and an arithmetic unitfor calculating a flow rate based on a first pressure value Pand a first temperature value Tmeasured after opening the first valve Vand the second valve Vto flow a gas and then closing the first valve Vand the second valve Vsimultaneously in a state where the gas is flowing; a second pressure value Pand a second temperature value Tmeasured after opening the first valve Vand the second valve Vto flow a gas, closing the second valve Vin a state where the gas is flowing, and then closing the first valve Vafter a predetermined time &#x394;t has elapsed; and a volume value V between the first valve Vand the second valve Vwhich corresponds to the second pressure value P

Flow rate control system and flow rate measurement method

A concentration measurement device for measuring the concentration of a measured fluid within a measurement cell by detecting transmitted light that has passed through the measurement cell having a light incidence window and a light emission window disposed opposing to each other, comprising a reflected-light detector for detecting reflected light of the light incidence window.

Concentration measurement device

A flow rate signal correction method applicable to a pressure-type flow rate control device that controls a flow rate by controlling pressure existing upstream of a restriction part includes a step of generating a primary signal indicating the flow rate in accordance with an output of a pressure sensor provided upstream of the restriction part and a step of generating a secondary signal as a corrected signal of the primary signal such that the current value of the primary signal and a value including information regarding one or a plurality of past values of the primary signal are used to derive a current value corrected according to a predetermined relational expression. The secondary signal is output as a flow rate signal during a stable flow rate period, and the secondary signal is not output as a flow rate signal during a transient change period.

Flow rate signal correction method and flow rate control device employing same

A concentration measurement device including at least one light source; a measurement cell for containing a fluid to be measured; a splitter for dividing light from the light source into incident light being incident into the measurement cell and non-incident light not being incident into the measurement cell; a transmitted-light detector for detecting transmitted light that is the incident light having passed through the measurement cell; a non-incident light detector for detecting the non-incident light; and an arithmetic part for correcting a detection signal of the transmitted-light detector using a detection signal of the non-incident light detector.

Growing community of inventors

Osaka, Japan

Masayoshi Kawashima