Average Co-Inventor Count = 8.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Dainippon Screen Mfg. Co., Ltd. (4 from 1,306 patents)
4 patents:
1. 7479205 - Substrate processing apparatus
2. 7428907 - Substrate processing apparatus
3. 7267130 - Substrate processing apparatus
4. 6951221 - Substrate processing apparatus