Alps Electric Co., Ltd.

Other

The Nippon Signal Co., Ltd.

Hoya Corporation

Pentax Corporation

Tohoku University

Esashi, Masayoshi

Haga, Yoichi

Canon Kabushiki Kaisha

Hitachi, Ltd.

Masayoshi Esashi

Munemitsu Abe

Norihiro Asada

Naoki Kikuchi

Eiji Shinohara

Masanori Maeda

Yoshihiro Someno

Satoshi Karasawa

Shinji Iino

Shinji Murata

Yoichi Haga

Rogerio Jun Mizuno

Yoshiaki Moro

Tomohisa Hoshino

Yoichi Room 1003 Haga

Takashi Katsumata

A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of actuators provided on both sides with respect to the turning axis and on the same surface side of the plate member. Each of the actuators includes a fixed electrode unit fixed to the frame member and a movable electrode unit fixed to the plate member. The fixed electrode unit includes a substrate, a pair of fixed comb electrodes provided on both surface sides of the substrate. The movable electrode unit includes a pair of movable comb electrodes, each of which engages with the corresponding fixed comb electrode with a gap therebetween. Both pairs of the fixed comb electrode and the corresponding movable comb electrode are configured such that a voltage can be applied therebetween independently.

Driving mechanism and micro-mirror device provided with the same

A scanning mirror unit for scanning a beam comprises: at least one cantilever which is formed by bonding an elastic material and a piezoelectric material together and supported by a base at its one end; and a movable mirror which is supported at least by a free end of the cantilever at its peripheral part. When voltage is applied to the piezoelectric material, the free end of the cantilever moves in a prescribed direction to press and move the peripheral part of the movable mirror while leaving a central part of the movable mirror at substantially the same position to cause a tilt to the movable mirror. With such composition of the scanning mirror unit, a reflecting member having a sufficient thickness (e.g. some hundreds of microns) can be employed for the movable mirror, by which a high power laser beam effective for treatment of affected parts, etc. can be reflected finely and durably.

Scanning mirror unit and beam scanning probe

A functional multilayer film and a method for manufacturing the same is provided in which the intervals of fine metallic bodies in the thickness direction and the arrangement thereof in the surface direction are regular, and the fine metallic bodies arranged on each layer are aligned in the thickness direction. A functional multilayer film is obtained by fixing a plurality of fine metallic bodies to a matrix made of a dielectric substance. The matrix is obtained by laminating metal-arranged thin films, which each contain a dielectric thin film having a predetermined thickness and the fine metallic bodies arranged on the dielectric thin film. A plurality of recesses is regularly formed on the surface of the dielectric thin film, and the fine metallic bodies are arranged in the lower parts of the recesses.

Functional multilayer film and method for manufacturing the same

There is disclosed a contactor which is used for testing electric characteristics of an object to be tested, the contactor comprising a contactor board, a plurality of conductive members formed through the contactor board, a plurality of beam members, and a contact terminal provided at the tip of each beam member. In this contactor, each beam member has a tip and a base end at its both ends, and has a step shape or an arch shape between the tip and the base end. The base end of each beam member is connected to each conductive member. The contact terminal member can be formed integrally with a conductive layer of the beam member.

Contractor, method for manufacturing the same, and probe card using the same

A gyroscope includes a tuning fork, which includes a plurality of tines formed of a conductive material and a supporting portion; an upper glass substrate and a lower glass substrate which sandwich the tuning fork; drive electrodes which are provided on each of the upper and the lower glass substrates in such a manner that parts of the drive electrodes oppose the tines and the remaining parts protrude from the tines, the drive electrodes being capacitively coupled to the tines and driving the tines in a direction parallel to the substrates; and detection electrodes which are capacitively coupled to the tines, and which detect displacements of the tines in a direction perpendicular to the vibrating direction of the tines.

Gyroscope and input unit using the same

The invention provides a capacitive micro sensor that suppresses electric noise generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork having three legs, driving electrodes and detecting electrodes provided on two glass substrates, driving field-throughs that supply the driving electrodes with a drive signal, and detecting fields-through that extract a detecting signal from the detecting electrodes. And, a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent field-throughs of the areas where the driving field-throughs and the detecting field-throughs are arrayed.

Capacitive micro sensor, gyroscope, and input device

A microactuator has a first substrate, a second substrate, a first comb electrode having a plurality of first comb elements formed on an inner surface of the first substrate, a second comb electrode having a plurality of second comb elements formed on an inner surface of the second substrate, and a connecting film formed by partially removing an interlayer formed on the inner face of any one of the first substrate and the second substrate. The first substrate and the second substrate face each other with a distance and are movable with respect to each other. The first comb elements and the second comb elements are alternately disposed. Any one of the first electrode and the second electrode is bonded to the connecting film. This microactuator is preferably used in magnetic head units and magnetic recording apparatuses.

Microactuator, method for making the same, and magnetic head unit and magnetic recording apparatus using the same

A gyroscope of the invention is provided with a tuning fork having three legs and a support, a top side glass substrate and a bottom side glass substrate between which the tuning fork is interposed, driving movable electrodes disposed on the top surface of each leg, driving fixed electrodes disposed on the bottom surface of the top side glass substrate so as to face to the driving movable electrodes, six detection movable electrodes connected to each other in parallel disposed on the top surface of the free end of each leg, and six detection fixed electrodes connected to each other in parallel disposed on the bottom surface of the top side glass substrate so as to face to the detection movable electrodes.

Gyroscope and input apparatus using the same

The invention provides a gyroscope that brings about the miniaturization of a device, improvement of detection sensitivity, and reduction of driving voltage. A gyroscope of the present invention is provided with a tuning fork formed of conductive material having a plurality of legs and a support, a top glass substrate and a bottom glass substrate for holding the tuning fork in-between, a plurality of driving electrodes for driving the plurality of legs in capacitance coupling with the legs, and a plurality of detecting electrodes, each detecting electrode is disposed so as to face to the end face of each leg in the extending direction correspondingly to each leg.

Gyroscope and input apparatus using the gyroscope that detects displacement of leg of tuning fork by means of capacitance change when angular velocity is entered

Planar type electromagnetic relay and method of manufacturing thereof

Planar type mirror galvanometer incorpotating a displacement detection

Planar type mirror galvanometer and method of manufacture

Growing community of inventors

Miyagi-ken, Japan

Masayoshi Esashi