Kawasaki Jukogyo Kabushiki Kaisha

Kawasaki Robotics (usa), Inc.

Nippon Shokubai Co., Ltd.

Masaya Yoshida

Hiroyuki Okada

Hajime Nakahara

Atsushi Nakaya

Junichi Sugahara

Avish Ashok Bharwani

Takao Yamaguchi

Shinya Kitano

Ming Zeng

Kazuo Fujimori

Kunio Takahashi

Kazuhiko Nakamura

Tetsuya Yoshida

Kenji Noguchi

Simon Jeyapalan

Yoshiyuki Yokota

Ichiro Namura

Daniel Chung

Takayuki Fukushima

Tadahiro Yoneda

Hirohiko Goto

Haruhiko Tan

Hiroki Takahashi

Tatsuhito Matsuda

Jun Takebayashi

Ippei Shimizu

Nobuhisa Noda

Shigefumi Kuramoto

Kiyoshi Kawamura

Atsushi Kameyama

Takahiro Aoyama

Masahiko Sumitomo

Toshihiko Miyazaki

Daijo Tomihisa

Satoshi Ishida

Naoki Kodama

Mark Tang

Yusuke Fujimoto

Mitsuo Nakazaki

George Chin

Hiroyuki Yoshida

Masato Adachi

Shohei Mase

Brandon Lee

Ryan Le

Luc Nguyen

Hiroo Nakagawa

Shoji Hashiguchi

Yuji Tanaka

Hui Kuen Chan

Shota Tominaga

Daniel Chan

A video confirmation computer for confirming video related to robot operation includes a storage unit and a processor. The storage unit stores information on the position of the electric motor that drives a link body of the robot received from the controller of the robot and information on the video obtained by a camera attached to the robot. The processor makes at least one of the video confirmation computer itself and a computer connected to the video confirmation computer display a model area and a video area side by side. In the model area, a two-dimensional or three-dimensional model reproducing the posture of the robot is displayed by computer graphics. In the video area, the video is displayed.

Video confirmation computer

A substrate conveying robot includes a hand sensor provided on a substrate holding hand, and a hand circuit substrate provided on the substrate holding hand and connected to the hand sensor, and a serial communication connection is made between a robot controller and the hand circuit substrate through an inside of an arm.

Substrate conveying robot system

A substrate transfer apparatus includes a base, an arm, an end effector provided at a tip of the arm and having first and second tip portions that are bifurcated, a light emitting unit, a light receiving unit, and a control device controlling an operation of the arm. The control device controls an operation of the arm so that light straightly traveling through a tip of the end effector scans edges of a plurality of substrates accommodated in a front opening unified pod (FOUP), and compares shape patterns of a measured waveform of an output value continuously changed in the light receiving unit with shape patterns of a reference waveform for comparison according to a relative positional relationship between the light and substrate during the operation of the arm and diagnoses at least one of a state of the substrate, the FOUP, and the end effector based on a comparison result.

Substrate transfer apparatus

A substrate transfer robot includes a robot body including a first hand having a first substrate placing part on which a substrate is placed and a first substrate holding mechanism configured to hold and release the substrate, and a robot controller. The robot controller controls a speed of the first hand such that an absolute value of a first maximum speed or an absolute value of a first maximum acceleration during a first period after the first hand starts retreating until the substrate is held by the first substrate holding mechanism is lower than an absolute value of a second maximum speed or an absolute value of a second acceleration during a second period after the substrate is held until the first hand ends retreating.

Substrate transfer robot and method of controlling the same

A substrate mapping devicemaps a plurality of substratesinside a container where the substratesare accommodated so as to be arrayed in a given arrayed direction. The substrate mapping deviceincludes a sensorconfigured to detect a state of the substrate, a manipulatorconfigured to move the sensor, and a control deviceconfigured to control the manipulatorto move the sensoralong a mapping course. The control devicesets a first mapping position and a second mapping position different in the position in the arrayed direction of the substratesfrom the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.

Substrate mapping device, method of mapping by the device, and method of teaching the mapping

A robot control device configured to control operation of a robot configured to transfer a substrate while holding the substrate is provided. The substrate becomes in a first state where an end effector holds the substrate and the substrate is not placed at an installation position, when the end effector positions at a first teaching point above the installation position. The substrate becomes in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector positions at a second teaching point below the installation position. The first and second states can be switched by causing the robot to perform a first operation to move the end effector from either one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point.

Robot control device, robot, and method of controlling the robot

A control method includes: recording information of an operation target point that is a destination, each time an end effector of a robot moves to the operation target point on an operation path; acquiring a present position of the end effector upon receiving an origin return command; detecting information of a return target point on a return path for returning the end effector to an origin; detecting information of the operation target point already reached immediately before a kth return target point or having a distance closest to the kth return target point, as a (k+1)th return target point; repeating detection of the information of the return target point to detect information of second to (n+1)th return target points; and moving the end effector along the return path passing through the first to (n+1)th return target points and returning to the origin.

Control method, control device, robot system, program, and recording medium

A robot system according to one or more embodiments may include a robot, and a control part. The robot may include one or more joints driven by an electric motor, and can hold a wafer by a holding part. The control part gives commands to the robot for control. When the robot holds and transports the wafer with the holding part, the control part performs, based on information about the electric motor, at least one of the following: determining whether slippage has occurred between the holding part and the wafer; and estimating an amount of slippage of the wafer relative to the holding part.

Robot system, and slip determination method

A method of detecting a substrate hold hand optical axis deviation includes: acquiring a hand reference turning position at which an ideal optical axis extends in a horizontal first direction; performing a first search processing; performing a second search processing similar to the first search processing to a second target body; and detecting an optical axis inclination from the ideal optical axis based on a difference between the positions detected in the first search processing and the second search processing. A distance in the second direction from the turning axis to the first target body is equal to a distance in the second direction from the turning axis to the second target body. On the hand, an intersecting position between the optical axis and the first target body is different from an intersecting position between the optical axis and the second target body.

Substrate transfer robot and method of detecting optical-axis deviation of substrate hold hand

A target provided to a substrate placement portion is detected by an object detection sensor at a plurality of rotation positions of the substrate placement portion. An index length which is a distance from a robot reference axis to the target in a direction perpendicular to an axial direction, or information correlated therewith, is calculated. At least one of a rotation position of a detection line about the robot reference axis and a rotation position of the substrate placement portion about a rotation axis when the target located on a line connecting the robot reference axis and the rotation axis is detected is calculated on the basis of the calculated index length or the calculated information correlated therewith. A direction in which the rotation axis is present as seen from the robot reference axis is specified on the basis of the calculated rotation position.

Substrate transfer apparatus and substrate placement portion rotation axis searching method

A robot system according to an embodiment may include a robot, a wafer jig that is held by the robot, a positioning base, a positional displacement detection device, a control part, and an offset acquisition part for acquiring an offset that occurs between a command position for the robot and an actual position. The positioning base includes contacting members. The wafer jig has a tapered surface. The tapered surface guides the wafer jig so that a center of the wafer jig approaches a predetermined position as a position where the taped surface contacts the contacting members is relatively higher. The robot places the wafer jig on the positioning base, then holds and conveys the wafer jig to the positional displacement detection device. The offset acquisition part acquires the offset based on a result in which the positional displacement detection device detects a positional displacement of the conveyed wafer jig.

Robot system and offset acquisition method

A wafer jig according to an embodiment may be used for a robot having a hand including a light emitting part and a light receiving part. The light receiving part detects detection light emitted from the light emitting part. The wafer jig includes a light source for emitting the notification light toward the light receiving part. The wafer jig outputs information to a hand side by emitting the notification light from the light source to the light receiving part.

Wafer jig, robot system, communication method, and robot teaching method

The method includes the steps of: detecting a part, of a surface of a target, that is located on an inner circumferential side of a predetermined circle centered on a rotation axis and passing the target, by an object detection sensor, at plural rotation positions when at least one of a rotation position of the target about the rotation axis on a substrate placement portion and a rotation position of a detection area about a robot reference axis is changed; calculating a quantity correlated with an index length representing a distance from the robot reference axis to the target when the target is detected by the object detection sensor, for each rotation position; and calculating the positional relationship between the robot reference axis and the rotation axis on the basis of, among the rotation positions, the one at which the quantity correlated with the index length is maximized or minimized.

Substrate transfer apparatus and method for calculating positional relationship between substrate transfer robot and substrate placement portion

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Himeji, Japan

Masaya Yoshida