Hitachi, Ltd.

Nippon Telegraph and Telephone Corporation

Director General of National Institute of Radiological Sciences

Masatsugu Nishi

Kazuo Hiramoto

Kenji Miyata

Junichi Hirota

Yoshihiro Michiguchi

Fuminobu Takahashi

Koji Tsumaki

Tetsuya Matsui

Masashi Kitamura

Masahiro Tadokoro

Hiroyuki Watanabe

Akira Noda

Akinori Shibayama

Masahiro Tooma

Yoshiya Higuchi

Shunji Kakiuchi

Shinji Sonoda

Kimio Yamada

Jyoji Nakata

Makoto Inoue

Manabu Ueno

Masayuki Nakajima

Akifumi Itano

A laser plasma X-ray source has an improved X-ray conversion efficiency and a minimized occurrence of debris, and a semiconductor lithography apparatus using the same and a method therefor are provided. An X-ray generation unit has a vacuum chamber 5 which encases the target; target supply unit 110 which supplies a fine particle mixture gas target into the vacuum chamber 5; a laser irradiation unit 120 which irradiates a laser beam 2 on the particle mixture gas target 10; and a target recovery unit 130 which recovers unused particle mixture gas target from the vacuum chamber 5.

Laser plasma x-ray source, semiconductor lithography apparatus using the

The present invention is to provide a method and an apparatus which are able to inject large electric current to a circular accelerator. In order to inject large electric current, that is, a large number of charged particles, a means is provided for injecting a beam into other region of a vacuum duct than the region which is defined as having a height equivalent to the height of the injected beam and a width from the injected point in the vacuum duct to the symmetrical point to the injected point with respect to the geometrical center of the vacuum duct.

Circular accelerator, method of injection of charged particle thereof,

The present invention is to provide a method and an apparatus which are able to inject a large amount of charged particles to a circular accelerator. In order to inject a large number of charged particles, the charged particle beams are injected into a region of a vacuum duct other than the region which is defined as having a height equivalent to the height of the injected beam and a width from the injected point in the vacuum duct to the symmetrical point to the injected point with respect to the geometrical center of the vacuum duct.

Circular accelerator, method of injection of charged particles thereof,

A circular accelerator is arranged to circulate a charged particle beam through a bending function provided by a bending magnet, set a tune of the charged particle beam being circulated as it is betatron-oscillated to a predetermined value through the effect of a quadrupole magnetic field, resonate the charged particle beam being circulated at the tune set to the predetermined value in a manner to increase an amplitude of the betatron oscillations over the stability limit of resonance, thereby extracting the charged particle beam. The circular accelerator includes a bending magnet formed to generate a quadrupole magnetic field component for horizontally focusing the charged particle beam being circulated and vertically defocusing the beam and another bending magnet formed to generate a quadrupole magnetic field component for horizontally defocusing the charged particle beam being circulated and vertically focusing the beam. The accelerator is reduced in size, easily operated, and enables to keep the location of the beam extraction and the diameter of the beam constant and output an excellent charged particle beam.

Method for extracting charged particle beam and small-sized accelerator

A small-sized circular accelerator capable of generating radiation of high brightness, an operation method of the circular accelerator, and a semiconductor irradiation system capable of using radiation of high brightness. An electron beam emitted from a pre-accelerator is injected to the inside of the storage ring by an injector, and accelerated and stored. Thereafter, each of insertion devices respectively disposed in linear orbit sections between main bending magnets and auxiliary bending magnets are excited to generate an alternating field therein. A meandering or spiral movement of the electron beam is caused by this alternating field. By superposing radiations emitted from vertexes of the meandering orbit or the spiral orbit, radiation having high brightness is generated.

Circular accelerator, operation method thereof, and semiconductor

A circular accelerator for charged particles in which by accelerated damping of the betatron oscillation, that is, a rapid reduction in a beam size through enhancing the radiation damping after the beam injection, a short period of time injection can be accomplished, and also a large current is capable of being stored through repetition of such beam injections.

Circular accelerator and a method of injecting beams therein

A circular accelerator for extracting a charged-particle beam is arranged to increase displacement of the beam by the effect of the betatron oscillation resonance and increase the betatron oscillation amplitude of the particles, which have initially betatron oscillation within the stability limit for the resonance, to exceed the stability limit thereby extracting the particles exceeding the stability limit of the resonance.

Circular accelerator and method and apparatus for extracting

A method of extracting a strong, charged particle beam, that is, a large current from an accelerator, and an accelerator capable of carrying out the method utilizes charged particles which are extracted from the accelerator. The equilibrium orbit of charged particles in one of a bending magnet and a magnet having multipole components greater than sextuple components, is shifted by a constituent element of the accelerator other than these magnets, to change the tune of charged particles. The adjustment of this tune based upon the shift of the equilibrium orbit in the above magnet for extracting charged particles, can keep the gradient of orbit of the extracted beam substantially constant. Accordingly, beam extraction is readily controlled, and a large current can be extracted from the accelerator.

Method of extracting charged particles from accelerator, and accelerator

An acceleration device for charged particles has an acceleration cavity through which passes a beam of the particles. High frequency power from a suitable source is transmitted to the cavity via a suitable transmission means (antenna) to transmit the energy to the particles and so accelerate them. The transmission means is controlled by a suitable control to control the coupling constant of the transmission means when power is applied. Also, the device may have a looped conductor in the cavity controlled by the control to couple to the field in the cavity and to extract power from the field, thereby to control the de-tuning of the applied power relative to the power transmitted to the particles. By controlling the coupling constant and/or the de-tuning, power may be transmitted efficiently to the beam of particles.

Acceleration device for charged particles

In visualizing an unknown object possessed by a person to be checked, a narrow pulsating radio wave beam is scanned over the whole surface of the person to observe the intensity of a reflected radio wave at each scan point. The frequency of the radio wave beam is set at a frequency easy to be transmitted by the human body to suppress the reflection from the human body and emphasize the unknown object to thereby discriminate between them. An image of the person to be checked is displayed and the portion having a strong reflection is color-displayed on the image to allow the check of the unknown object possessed by the person without contacting the person.

Method of detecting unknown object and apparatus therefor

Charged particle accelerator and method of cooling charged particle beam

An electron storage ring has bending magnets, quadrupole magnets, and sextupole magnets arranged in a ring for constraining a beam of electrons along a path. When the beam is injected, a control means controls a power source for the magnet so that the beam has a high equilibrium emittance. This gives the beam a large dynamic aperture, simplifying beam injection. Once the beam has been injected, the field strengths of the magnets are varied to cause a reduction in the emittance to a low value, at which the beam is stored. Synchrotron radiation is generated which has a high brightness because the low emittance means the beam has a small diameter. During the reduction in equilibrium emittance, the betatron oscillation frequency is maintained on a stable operation region and the chromaticity is maintained substantially zero.

Electron storage ring

A wake field acceleator in which a current to be formed by a driving charged particle bunch that excites a wake field is controlled so as to compensate a Joule heat loss on the wall surface of a cavity constituting the wake field accelerator, and to subject the driving charged particle bunch to a substantially uniform deceleration voltage. With the wake field accelerator, the maximum transformer ratio can be realized with a small beam length of the driving charged particle bunch, and an energy extraction efficiency of approximately 100% can be realized.

Wake field accelerator

When accelerating charged particles on synchrotron acceleration basis by using a circular accelerator having a RF acceleration cavity, the detuned amount representative of an offset between oscillation frequency of a RF oscillator for the RF acceleration cavity and resoance frequency of the RF acceleration cavity and the RF power for supplying the charged particles with energy are controlled in compliance with changes in energy of the charged particles without changing the oscillation frequency. A great number of charged particles injected into the circular accelerator can be accelerated to the ultimate storage energy during the acceleration on synchrotron acceleration basis without causing charged particle beam loss.

Method of synchrotron acceleration and circular accelerator

A pair of iron magnetic poles are disposed at the exit of electrons of each of deflecting magnets in an electron storage ring, in which electrons are stored during a certain period of time while being rotated therein, for generating a magnetic field in the direction opposite to that generated by the deflecting magnets. The magnetic field generated by these iron magnetic poles compensates deviations of the orbit of electrons due to the magnetic fringe field of each of the deflecting magnets.

Growing community of inventors

Katsuta, Japan

Masatsugu Nishi