Ngk Spark Plug Company, Limited

Masatoshi Ueki

Hitoshi Yokoi

Takafumi Oshima

Takio Kojima

Yoshihiko Kohmura

Yoshinori Tsujimura

Koichi Fujita

Kouichi Ikawa

An object of the invention is to provide a resistor element that makes it possible to adjust the resistance value of a precursor easily in producing a resistance element having a target resistance value from the precursor, as well as to the precursor and a related resistance value adjusting method. A precursorhas a meandering resistance pattern formed on a front surfaceof a substrateas well as at least three trimming lines. The precursoris configured so as to be defined by a geometric sequence that satisfies Inequality 0.5&#x3b1;&#x3c;&#x3b1;&#x3c;&#x3b1;, where &#x3b1;is the general term of the sequence that is obtained by arranging, in descending order, resistance value increases of the precursor at the time of cutting of the respective trimming lines and normalizing the thus-arranged resistance value increases by an initial resistance value of the precursor in a state that none of the trimming lines are cut.

Resistance element, its precursor, and resistance value adjusting method

A platinum temperature sensor incorporating an evaporation-suppressing layer containing platinum in the vicinity of the platinum thin-film resistor of the sensor. The evaporation-suppressing layer is preferably positioned between the platinum resistor and a porous layer that is formed close to the platinum resistor and in contact with the evaporation-suppressing layer.

Platinum resistor temperature sensor

A mass flow sensor includes a semiconductor substrate , an insulating thin film , heaters and , temperature measurement resistors and , and a protective layer . The heaters and are formed on the surface of the insulating thin film , and are provided adjacently such that the heater is provided upstream the heater and the heater is provided downstream the heater . A cavity is formed below the heaters and , and the heaters are thermally insulated from the remaining portion of the semiconductor substrate. The temperature measurement resistors and are formed on the top surface of the insulating thin film , and are provided at opposite sides of the heaters and , such that the resistors are aligned with respect to the flow passage of a fluid. In the mass flow sensor and the mass flowmeter including the sensor, the flow rate and flow direction of a fluid can be detected by means of merely the heaters and , which are active elements. Therefore, the sensor and the flowmeter exhibits high-speed response with respect to change in the flow rate of the fluid.

Mass flow sensor and mass flowmeter comprising the same

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Aichi, Japan

Masatoshi Ueki