Hitachi-Kokusai Electric Inc.

Kokusai Electric Co., Ltd.

Mitsubishi Hitachi Power Systems, Ltd.

Hitachi-Ge Nuclear Energy, Ltd.

Masatoshi Takada

Takaaki Noda

Naoyuki Nagafuchi

Yasuhiro Inokuchi

Kenzo Urabe

Fumihide Ikeda

Yoichi Murakami

Mamoru Sueyoshi

Michiko Nishiwaki

Hiroko Ono

Hidenori Inoue

Toshihiro Morikawa

A method of cleaning an interior of a process chamber by supplying a cleaning gas into the process chamber after a process of forming a thin film on a substrate in the process chamber is performed, including alternately repeating changing a pressure in the process chamber from a first pressure range to a second pressure range, and changing the pressure in the process chamber from the second pressure range to the first pressure range. In this method, when the pressure in the process chamber is changed to the first pressure range, the pressure in the process chamber is changed to the first pressure range without being maintained at the second pressure range, and when the pressure in the process chamber is changed to the second pressure range, the pressure in the process chamber is changed to the second pressure range without being maintained at the first pressure range.

Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

An interference signal removal system includes interference signal estimating means for estimating an interference signal contained in a received signal based on the received signal and a result obtained by removing an interference signal from the received signal, interference signal removing means for removing from the received signal the interference signal estimated by the interference signal estimating means; and interference signal estimation controlling means for storing the interference signal estimation result of the interference signal estimating means in memory and controlling the interference signal estimation by the interference signal estimating means so as to estimate an interference signal contained in the received signal based on a past interference signal estimation result stored in memory.

Interference signal removal system

An interference-signal removing apparatus is provided for removing narrow-band interference signals from input signals including wide-band desired signals and the narrow-band interference signals, which suppresses that even desired signals are removed. The interference-signal removing apparatus includes an extraction section for extracting interference signals from input signals, a removal circuit for removing extracted interference signals from input signals, an extraction control section for controlling extraction of interference signals by the extraction section in accordance with the removal result, and an extraction-amount suppression section for suppressing the interference signal amount to be extracted in accordance with input signals.

Interference-signal removing apparatus

A substrate processing apparatus comprises a hot-wall type processing chamber for processing a substrate, a heater capable of heating an interior of the processing chamber, a substrate holder capable of holding the substrate and processing the substrate in the processing chamber in a state where the substrate holder holds the substrate, and a mechanism, which is capable of allowing the substrate holder to hold the substrate and then transferring the substrate holder holding the substrate into the processing chamber, and/or which is capable of carrying out the substrate holder from the processing chamber in a state where the substrate holder holds the substrate, and then separating the substrate from the substrate holder.

Substrate processing apparatus and substrate processing method

A correlating filter includes a delay circuit which outputs a plurality of tap output signals TP1 to TPn having different delays. The correlating filter further includes a weighted adder circuit which weights the tap output signals, respectively, and adds the weighted tap output signals so as to derive a correlated output signal. A timing control circuit produces a control signal based on the correlated output signal from the weighted adder circuit. The control signal is high in level when the correlated output signal has a correlation peak. A power feed to the weighted adder circuit is achieved via a switching element. The switching element is only turned on when the control signal is high in level so as to enable the power feed to the weighted adder circuit. Thus, reduction in power consumption is achieved and the filter can be used in a portable radio device.

Correlating filter and CDMA receiver

Growing community of inventors

Tokyo, Japan

Masatoshi Takada