Hitachi, Ltd.

Masatoshi Nakazawa

Takaaki Suzuki

Ken Takahashi

Tadahiko Miyoshi

Kunihiro Maeda

Takeo Yamazaki

Yukio Takeda

Atsuko Soeta

Kie Nakamura

Choushiro Kitazawa

Shinichiro Takatani

Chushirou Kusano

Takeshi Kikawa

A superconducting oxide wire and a method of manufacturing the same are disclosed. The wire comprises a pipe made of a metal and a superconducting oxide material filling the interior of the pipe and comprising superconducting oxide grains which are bonded to each other and which have a perovskite crystal structure having a C face and a C axis. The superconducting oxide grains contain more than 50 vol % of plate-shaped grains of which the length in the direction of the C face is greater than the length in the direction of the C axis. The C faces of most the plate-shaped grains are arranged to be directed toward longitudinal axis of the pipe.

Superconducting wire and method of manufacturing the same

A compound semiconductor is etched by a step of substituting a composite element of a compound semiconductor with other element, thereby forming a compound layer on the surface of the compound semiconductor and a step of removing the compound layer from the surface. Etching depth is controlled not by etching time, but by the number of runs (repetitions) of the etching step, and thus can be precisely controlled.

Method and apparatus for etching compound semiconductor

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Ibaraki, Japan

Masatoshi Nakazawa