Tokyo Seimitsu Co., Ltd.

Osaka University

Nagoya University

Masatoshi Arai

Norihiko Nishizawa

Toru Suzuki

Tomohiro Aoto

A dimension measuring apparatus includes a light beam splitting element for splitting light emitted from a white light source into measuring light flux and reference light flux, a reference light scanning optics for varying optical path length of the reference light flux, a detector for detecting interference signal produced by the light fluxes, and a controller for determining the surface height of the object from the optical path length of the reference light flux corresponding to maximum value of the interference signal. The reference light scanning optics includes a rotary member, first and second reflective elements disposed to be symmetrical with respect to the rotation axis of the rotary member, and light beam deflecting members that direct the reference light flux to be incident on the first reflective element along the direction parallel and opposite to the incident direction of the reference light flux on the second reflective element.

Dimension measuring apparatus

A method and device for measuring the surface contour such as the surface roughness of a member to be measured having a curved surface shape. In the surface contour measuring device, a cubic curved line corresponding to the curved surface of the member to be measured is obtained from a measurement signal according to a method of least squares, and the cubic curved line is removed from the measurement signal to obtain a roughness curved line, so that, even when the member to be measured has a curved surface, the surface roughness of the member can be obtained with accuracy.

Growing community of inventors

Mitaka, Japan

Masatoshi Arai