Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,346 patents)
2 patents:
1. 11865590 - Substrate cleaning method, processing container cleaning method, and substrate processing device
2. 11504751 - Substrate cleaning method, processing container cleaning method, and substrate processing device