Toshiba Memory Corporation

Masato Naka

Hideaki Sakurai

Minako Inukai

Kyo Otsubo

Kenji Masui

Tetsuo Takemoto

A method for detecting coordinates includes detecting a first position in an inspection target placed on a placement surface of an inspection stage and a second position in the inspection target separated from the first position. A coordinate shift from the first position to the second position includes a first shift component in a first direction taken along the placement surface, and a second shift component in a second direction taken along the placement surface and crossing the first direction. The method further includes calculating a coordinate in the first direction of the second position using a first function, the first function including the first shift component and the second shift component as variables; and calculating a coordinate in the second direction of the second position using a second function, the second function including the first shift component and the second shift component as variables.

Method for detecting coordinates, coordinate output device and defect inspection device

A substrate cleaning method includes: steps (a) to (d). In step (a), a liquid is supplied onto a nanoimprint template substrate that has a patterned surface with foreign particles to form a liquid film on the patterned surface. In step (b), the liquid film is solidified to form a solidified film including the foreign particles. In step (c), the substrate is reversed. In step (d), the solidified film is melted to remove the foreign particles.

Substrate production method, substrate processing apparatus, and substrate production system

An inspection device according to an embodiment includes a microscope, a storage section, an image processing section and an inspection section. The microscope is configured to obtain a primary image by capturing an inspection target. The storage section stores a function defining a relationship between a low-resolution image and a high-resolution image of a calibration sample. The high-resolution image has smaller pixel size than the low-resolution image. The image processing section is configured to generate a secondary image based on the primary image by using the function. The secondary image has smaller pixel size than the primary image. The inspection section is configured to inspect the inspection target using the secondary image.

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Kanagawa, Japan

Masato Naka