Jeol Ltd.

Kabushiki Kaisha Toshiba

Nara Institute of Science and Technology

National University Corporation Nara Institute of Science and Technology

Masato Kudo

Koji Murakami

Tetsu Sekine

Hiroyuki Matsuda

Hiroshi Daimon

Makoto Kato

A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL) among electrodes (ELto ELn). Voltages of the later-stage electrodes (ELto ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about &#xb1;60&#xb0;.

Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system

An apparatus is disclosed which computes the full-step number of full-step drive pulses at each control period, generates microstep drive pulses on the basis of the full step number so as to make a drive angle at each control period correspond to a full-step unit, and drives a motor drive current on the basis of the microstep drive pulses.

Antenna drive apparatus equipped with a stepping motor

An electron energy spectrometer having an electron energy analyzer equipped with plural detectors including a reference detector. The energy of electrons impinging on the reference detector is stepped in increments. The value of these increments can be set at will. The spectrometer has improved detection accuracy and improved detection sensitivity. The spectrometer irradiates the surface of a sample with an electron beam. The energy of the electron beam is swept. The intensities of electrons ejected from the sample surface are analyzed. This instrument utilizes the multidetector scheme. Data about the intensities of the electrons is collected. Interpolation calculations are performed at each value of the energy according to the collected data.

Method and apparatus for electron energy analysis

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Tokyo, Japan

Masato Kudo