Shin-etsu Polymer Co., Ltd.

Shin-etsu Handotai Co., Ltd.

Other

Masato Hosoi

Hideo Kudo

Toshitsugu Yajima

Takayuki Nakayama

Takashi Matsuo

When the position of a substrate is shifted, the substrate is made to return to an original position by enabling the position of the substrate to be controlled using an elastic piece which protrudes inside from a vertical direction part of a frame. Further, a coupling piece is provided extending in a vertical direction and having both ends thereof coupled to a horizontal direction part of the frame, and a protruding part protruding inside a substrate container is provided on the coupling piece. Then, this protruding part is configured to have an inclined face which is inclined in a direction intersecting the substrate and enabled to come into contact with the periphery of the substrate, and thereby this inclined face guides the substrate to reduce the friction of the substrate and to control the position of the substrate.

Retainer and substrate storage container provided with same retainer

A substrate storage container that can be highly accurately positioned and produced at increased productivity, and a method of producing the substrate storage container are provided. The substrate container () comprises a container body () having an opening through which a substrate can be taken in and out thereof and a plurality of positioning members () arranged at a bottom of the container body (). Each positioning member () includes a housing () and a plate-like member (), the housing () having on one side thereof a pair of positioning slope faces () and an opening on the other side thereof, the plate-like member () closing the opening. The container body () is insert-molded with the positioning members () used as inserts, and the positioning members () are integrally fixed to the container body ().

Substrate storage container and method of producing the same

A presser member () of the present invention is formed of different materials for the contacting part () to press-hold the precision substrates () and for the parts other than the contacting part (). The presser member () is shaped from a thermoplastic elastomer for a rectangular frame part, and the contacting part () has a pair of structuring parts () provided in such a fashion as to inwardly extend from each of a pair of oppositely facing sides. A second contacting part () is formed in the extension peripheral part extending via a supporting part (). The other parts are shaped from a thermoplastic resin. The aforementioned contacting part () is provided with grooves of a V-shaped cross section with inclinations changed in the middle for receiving the peripheries of precision substrates (), and V-grooves for press-holding the peripheries of precision substrates are provided in resilient pieces () separated and protruding in a comb teeth-like fashion to form the second contacting part ().

Precision substrate storage container and retaining member therefor

The identification structure includes: a bottom plate screwed to the undersurface of a container body in which wafers are stored in alignment; a multiple number of passage holes bored in the bottom plate at identification areas thereof; and identification pieces to be selectively fitted to the multiple number of passage holes. The identification piece assumes a bottom-closed cylinder in which a pair of flange portions extend radially outward in all directions from the whole peripheral wall of the bottom-closed cylinder, at one and the other hollowed open ends so as to abut the periphery of the passage hole and that the flange portion at the hollowed opening end tapers from one end near to the closed end towards the other hollowed open end, forming an inclined insert surface. This bottom-closed cylinder can be fitted from either above or below the bottom plate. In this arrangement, the information about a substrate storage container is obtained based on the set mode of the identification piece.

Identification structure of a substrate storage container and method of identifying a substrate storage container

Provided by the invention is an air-tightly sealable bell jar container comprising a base plate and a bell jar covering mountable on the base plate. An air-tight sealing mechanism is obtained by forming a laterally and downwardly opening annular groove in the base plate to support an O-ring gasket of rubber and providing, below the base plate, a presser plate which presses up the O-ring gasket against the base plate by a means of cams or screw means in such a fashion that the O-ring gasket is elastically deformed and laterally bulged out to be brought into air-tight contacting with the inner wall of the bell jar covering surrounding the base plate.

Air-tightly sealable container with bell jar covering

A container has a storage case for storing silicon wafers in alignment which is of a box-like configuration having an opening on its front side, with a multiple-number of fitting slots formed on the inner top and bottom faces near the front opening. The container further has a FIMS door for opening and closing off the front opening of the storage case, a gasket attached to the rim of the FIMS door, a latching mechanism provided in the FIMS door for causing engaging claws to fit into corresponding fitting slots when the FIMS door is attached and releasing the engagement of the engaging claws with the fitting slots when the FIMS door is removed, and an outer door for shipping, fitted on the front side where the storage case has been confined with the FIMS door, for covering the FIMS door.

Shipping container

A clamping structure between a container body and a cover mountable thereon in an air-tightly sealable contained such as wafer carriers from semiconductor silicon wafers used for storage and transportation thereof. The clamping structure includes a container body and a cover mountable on the container body each provided with an encircling stepped flange around the open periphery. The stepped flanges on the container body and the cover are engageable each with the other. A pair of engagement tabs, each having an engagement groove, protrude from the open periphery of each of the container body and the cover at oppositely facing positions. Also, an engagement board which is resin plate is provided with a U-shaped openwork notch at the center thereof in a longitudinal direction. The notch is engageable at the upper part thereof with the engagement groove in the engagement tab of the cover and is engageable at the lower part thereof opposite to the upper part with the engagement groove in the engagement tab of the container body.

Growing community of inventors

Itoigawa, Japan

Masato Hosoi