Asahi Kogaku Kogyo Kabushiki Kaisha

Pentax Corporation

Asahi Kogaku Kogyo K.k.

Asahi Optical Co., Ltd.

Masato Hara

Toshihiro Nakayama

Atsushi Kida

Masayuki Sugiura

Atsumi Kaneko

Yoshinori Kobayashi

Shigetomo Ishibashi

Eiji Takasugi

Shigeru Wakashiro

Masahiro Oono

Kiyoshi Yamamoto

Masaaki Niiho

Ikuzo Okamoto

Yukiyasu Nishikawa

Shuji Hoshika

Osamu Shindow

Hideyuki Ishiai

Koichi Maruyama

Shinichi Suzuki

Noriaki Takahashi

Satoshi Takami

Masami Shirai

Kiyoshi Itoh

Koji Tsuda

Yuzuru Doi

Eiichi Ito

Teruo Sakai

Tunehiko Sonoda

Harumi Kawasaki

Taichi Nakanishi

Hirochika Aiura

Ryouji Honda

Toshifumi Kinba

Takashi Tohara

Hideo Yoshihama

The projection aligner transfers a mask pattern formed on a mask to a substrate. A collimated light beam is emitted from a light source toward the mask. The light beam passed through the mask is deflected by a first mirror formed on a deflector toward a lens unit having a positive power. A reflector is provided at the other side of the lens unit to reflect back the light beam passed through the lens unit. The light beam reflected by the reflector passed through the lend unit again and then deflected by a second mirror formed on the deflector toward the substrate to form an image of the mask pattern. The size of the image formed on the substrate is adjusted by moving the reflector along the optical axis of the lens unit, and the deflector along the optical path of the light beam passed through the mask.

Projection aligner

A projection aligner scans a plurality of light beams over a mask in a main scanning direction to transfer an image of a mask pattern on an object by the light beams passed through the mask. The projection aligner has a plurality of optical systems for projecting light beams passed through the mask onto the object. Each of the optical system includes a lens unit, a reflector provided to one side of the lens unit and a deflector provided to the other side of the lens unit. The light beam passed through the mask is deflected by the deflector, passes through the lens unit, reflected back by the reflector, passes through the lens unit again, and deflected by the deflector toward the object. The size of the image formed by the light beam is varied by moving the reflector in the main scanning direction and moving the deflector in a direction perpendicular to the object. The location of the image on the object in the auxiliary direction is adjusted by further moving the reflector in the auxiliary direction.

The projection aligner for transferring an image of a mask pattern of a mask onto an object to be exposed comprises a projection optical system that forms the image of the mask pattern onto the object, an expansion ratio determiner that measures lengths of the object in first and second directions and determines first and second expansion ratios, which are expansion ratios of the object in the first and second directions, respectively, based on those lengths, and a magnification controller that adjusts the magnification of the projection optical system to a value between the first and second expansion ratios.

An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.

Optical member inspecting apparatus and method of inspection thereof

The projection aligner transfers the image of the pattern formed on the mask to the object by scanning a light beam across the mask and the object. The projection aligner includes a driving mechanism for synchronously moving the mask and the object and thereby scanning the light beam across the mask and the object in a predetermined beam scanning direction. The light beam scanning the mask passes through the mask and is projected onto the object by a projection optical system of which magnification is adjusted by a magnification adjusting mechanism. The magnification adjusting mechanism and the driving mechanism are controlled by a controller such that the difference between the magnification of said projection optical system and a velocity ratio of the mask and the object moved by the driving mechanism becomes below a predetermined maximum value which is determined based on a line width of the pattern formed on the mask.

A target, which is photographed with an object at a spot for a photogrammtric analytical measurement, comprises first, second, third standard point members and assistant point members. The standard point members and the assistant point members are covered by a reflecting sheet. A distance between the first and second standard point members equals a distance between the second and third standard point members. Two assistant point members are positioned on a first straight line connecting the first and second standard point members. One assistant point member is positioned on a second straight line connecting the second and third standard point members. The distance between the first and second standard point members, the distance between the second and third standard point members, and an angle defined by the first and second straight lines, are predetermined.

Target for photogrammetric analytical measurement system

A three points range of high brightness and a four points range of high brightness in a photographed image are selected. It is checked if an identical end point is shared by the three and four points range selected. It is checked if a center of gravity corresponding to the identical end point, a center of gravity corresponding to another end point of the three points rage opposite to the identical end point, and a center of gravity corresponding to another end point of the four points range opposite to the identical end point, meet a positional relationship between standard points of a target.

Device for calculating positional data of standard points of photogrammetric target

An optical member inspection apparatus includes an inspection optical system having a light source, and a diffusing means for diffusing the light emitted from the light source. The diffusing means has a central portion and a peripheral portion. The diffusion transmittance of the peripheral portion is higher than the diffusion transmittance of the central portion. The inspection optical system is also provided with an image pick-up means to pick-up an image of the optical member to be inspected, and is positioned so as, to receive that light emitted from the light source and transmitted through the diffusing means and the optical member. A judging means is also provided, for judging whether or not the optical member has a defect, in accordance with image signals output from the image pick-up means.

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Tokyo, Japan

Masato Hara