Hokuriku Electric Industry Co., Ltd.

Masato Ando

Hiroyuki Sawamura

Shigeru Hirose

Yoshimitsu Motoki

Tsutomu Sawai

Yoshiyuki Nakamizo

Masahide Tamura

Satoshi Tsubata

Takeshi Arikura

Yuichi Ishikuro

Force sensor

A semiconductor sensor of the present invention is capable of preventing a diaphragm portion of the sensor from being damaged if a weight collides against a semiconductor integrated circuit substrate of the sensor and is further capable of preventing the diaphragm portion from being bent significantly even when a semiconductor sensor element of the sensor is disposed inside a distorted or deformed casing. A rear surface of the semiconductor integrated circuit substrateis joined onto a wall surface of the casingthat defines a receiving chamber of the casing. A support portion of the semiconductor sensor element is joined onto a front surfaceof the semiconductor integrated circuit substrate. A shock absorbing layer is formed on the front surfaceof the semiconductor integrated circuit substrateat least on a part thereof facing the weightof the semiconductor sensor element, for suppressing the bouncing of the weightwhen the weightcollides against the semiconductor integrated circuit substrate

Semiconductor Sensor

A semiconductor force sensor capable of preventing a diaphragm part from being broken and accurately measuring a force applied thereto in a direction orthogonal to the diaphragm part, wherein a force transmitting device for applying a measured force to the diaphragm part of a semiconductor force sensor element is formed of a sphere having a rigidity, and a through hole passing through an opposed wall part toward the diaphragm is formed in the opposed wall parts at a position opposed to the center part of the diaphragm part so that a part of the sphere can face the outside of the opposed wall part and stores a part of the remaining part of the sphere to allow the sphere to be moved only in a direction orthogonal to the diaphragm part and rotated on the center part of the diaphragm part.

Semiconductor force sensor

A semiconductor force sensor capable of preventing a diaphragm part () from being broken and accurately measuring a force applied thereto in a direction orthogonal to the diaphragm part (), wherein a force transmitting means for applying a measured force to the diaphragm part () of a semiconductor force sensor element () is formed of a sphere () having a rigidity, and a through hole () passing through an opposed wall part () toward the diaphragm () is formed in the opposed wall parts () at a position opposed to the center part of the diaphragm part () so that a part of the sphere () can face the outside of the opposed wall part () and stores a part of the remaining part of the sphere () to allow the sphere () to be moved only in a direction orthogonal to the diaphragm part () and rotated on the center part of the diaphragm part ().

The present invention provides a semiconductor acceleration sensor wherein a semiconductor element is prevented from being damaged even when at least part of a weight is disposed in an internal space of a semiconductor sensor element and the mass of a weight is accordingly increased. An inner peripheral surface of a support portionis constituted by four trapezoidal inclined surfacesof a substantially identical shape which are annularly combined so as to define an outer peripheral surface of a frust-pyramidal space. A weightis so constructed as to have an abutting portion including a linear portionwhich abuts against the inclined surfacesconstituting the inner peripheral surface of the support portionwhen the weightmakes a maximum displacement in a direction where a diaphragm portionis located. The abutting portionhas a circular outline shape as seen from a side where a weight fixing portionis located. A stopper structure is constituted by the inclined surfacesand the abutting portionof the weight, for restricting a displacement range of the weightin the direction where the diaphragm portionis located.

Semiconductor acceleration sensor and process for manufacturing the same

An acceleration detecting device capable of permitting a weight, a diaphragm and a base to be precisely positioned on a casing of a measuring equipment or the like. The weight, diaphragm and base are integrally formed of a metal material into a single unit. An insulating casing is integrally formed while incorporating the single unit as an insert therein. The insulating casing has a recess defined by a side wall thereof, which is formed with a window for exposing a part of the base therethrough. The recess of the casing is closed with a metal cover member, which is mounted on the casing. The cover member is integrally provided with a contactor which is elastically forced against the base through the window. The base is electrically connected to ground terminals of terminal fitments.

Growing community of inventors

Toyama, Japan

Masato Ando