Tokyo Electron Limited

Masataka Sato

Yasushi Takeuchi

Katsuhiko Oyama

Daisuke Yamagishi

A substrate conveying method conveying a layered body having first and second substrates stacked with a spacer member provided between their respective bottom surfaces facing each other includes receiving the first substrate by holding the first substrate from below its bottom surface using a first holding mechanism provided on a side of a first fork provided above a second fork, and turning the first fork upside down and placing the received first substrate on the second fork; receiving the spacer member held in a substrate holding part by holding the spacer member from above using a second holding mechanism provided on the same side of the first fork as the first holding mechanism, and placing the received spacer member on the first substrate; and holding the second substrate from above its top surface using the first holding mechanism, and placing the received second substrate on the spacer member.

Substrate conveying method, recording medium in which program is recorded for causing substrate conveying method to be executed, and substrate conveyor

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Iwate, Japan

Masataka Sato