Seiko Epson Corporation

Masashi Yoshiike

Yoshihide Matsuo

Naoya Sato

Tomoyoshi Saito

Shuichi Tanaka

Naohiro Nakagawa

Haruo Yamaguchi

A piezoelectric device includes a first substrate that includes a piezoelectric element () provided in a first region where bending deformation is allowed and an electrode layer () electrically connected to the piezoelectric element (), a second substrate in which a bump electrode () abutting and conducting the electrode layer (), and having elasticity is formed, and which is disposed so as to face the piezoelectric element () with a predetermined space, and adhesive () that bonds the first substrate and the second substrate in a state where a distance between the first substrate and the second substrate is maintained. The adhesive () has a width in a center portion in a height direction relative to a surface of the first substrate or the second substrate greater than a width in end portions in the same direction.

Piezoelectric device, liquid ejecting head, manufacturing method of piezoelectric device, and manufacturing method of liquid ejecting device

There is provided a MEMS device including: a substrate having a resin portion that protrudes from one surface thereof and is made of a resin, in which the first wiring extends along a first direction on the one surface from a position overlapping the resin portion to a position deviating from the resin portion, and in which a width of the resin portion is equal to or larger than a width of the first wiring covering the resin portion in a second direction intersecting the first direction.

MEMS device, liquid ejecting head, liquid ejecting apparatus, method for manufacturing MEMS device

There is provided a MEMS device which includes a second substrate which is disposed with an interval from a first substrate, and an interposed member which is interposed between the first substrate and the second substrate, and which has space which is defined by the first substrate, the second substrate, and the interposed member, in which the first substrate includes a wiring which extends from a first surface side which is a surface on a side opposite to the second substrate toward a second surface side which is a surface of the second substrate side and is made of a conductor, in which an end portion of the first surface side of the wiring is covered by a first protective film provided on the first surface side, and in which an end portion of the second surface side of the wiring faces the space.

MEMS device, liquid ejecting head, and liquid ejecting apparatus

A manufacturing method of an electronic device includes a first stacking process of forming a first photosensitive adhesive on a surface on a second substrate side in a first substrate; and a second stacking process of forming a second photosensitive adhesive, which overlaps the first photosensitive adhesive, having a lower degree of cure than that of the first photosensitive adhesive; and a bonding process of bonding together the first substrate and the second substrate by curing the second photosensitive adhesive by heating, in a state in which the first photosensitive adhesive and the second photosensitive adhesive are interposed between the first substrate and the second substrate.

Electronic device and manufacturing method of electronic device

An electronic device is manufactured by a method including applying a photosensitive adhesive agent either to a pressure chamber forming substrate and a vibrating plate or to a sealing plate having a structure of a lower height from a bonding surface, precuring the photosensitive adhesive agent by heating, patterning the precured photosensitive adhesive agent, and bonding the substrates together with the structure (bump electrode) and the photosensitive adhesive agent interposed therebetween.

Electronic device manufacturing method and electronic device

A piezoelectric device includes a first substrate having a piezoelectric element on one surface thereof and a second substrate having penetration wiring that includes a through hole formed in a thickness direction thereof and a conductor section formed in the through hole. A resin section is formed on a surface of one substrate of one of the first substrate and the second substrate, which opposes the other substrate, and is formed of an elastic body in a shape protruding toward the other substrate, and a first electrode layer is formed on the surface of the other substrate side of the resin section. A second electrode layer is formed on a surface of the other substrate that opposes the one substrate, and the first substrate and the second substrate are joined in a state in which the first electrode layer and the second electrode layer are abutting against each other.

Piezoelectric device, liquid ejecting head and method for manufacturing piezoelectric device

Provided is a bonded structure including a first substrate in which a resin portion made of an elastic member protrudes on one surface and a first electrode layer is formed to cover at least a part of the resin portion, and a second substrate in which a second electrode layer electrically connected to the first electrode layer is formed on a surface facing the first substrate, the first substrate and the second substrate being bonded to each other in a state in which a photosensitive adhesive is interposed therebetween. In a surface of one of the first substrate and the second substrate on the photosensitive adhesive side, a first region reflecting light and a second region less likely to reflect light than the first region are provided in positions different from each other on a region overlapping the photosensitive adhesive in a substrate bonding direction.

Bonded structure, piezoelectric device, liquid ejecting head, and method of manufacturing bonded structure

An electronic device includes a first substrate that has a drive region in a first surface, and a second substrate that has a second surface that is joined to the first surface by a joining resin portion composed of a photosensitive resin. In the electronic device, a space that houses the drive region is defined between the first surface and the second surface by the joining resin portion, and a joining surface of the joining resin portion joined to the first surface is smaller than a joining surface of the joining resin portion joined to the second surface.

Electronic device, liquid ejecting head, and method of manufacturing electronic device

An electronic device includes a drive substrate (a pressure chamber substrate and a vibration plate) including a piezoelectric element and electrode wirings related to driving of the piezoelectric element formed thereon, and a sealing plate bonded thereto, the electrode wirings are made of wiring metal containing gold (Au) on the drive substrate through an adhesion layer which is a base layer, and has a removed portion in which a portion of the wiring metal in a region containing a part bonded to a bonding resin is removed and the adhesion layer is exposed.

Electronic device, and manufacturing method of electronic device

A wiring substrate includes a device substrate having a first surface, a sealing plate having a second surface superimposed on the first surface via an adhesive film and crossing the first surface, and wires set along the surfaces of the first surface, the adhesive film, and the second surface. The wiring substrate includes, between the wires adjacent to each other, a recessed section forming a recess with respect to a first bonding surface of the adhesive which is in contact with the first wire and a second bonding surface of the adhesive which is in contact with the second wire.

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Chino, Japan

Masashi Yoshiike