Jeol Ltd.

Takata Corporation

Masashi Shimizu

Hidetaka Sawada

Masahiro Shiotani

Kazuki Yagi

Shuichi Yuasa

Takeo Sasaki

Yu Jimbo

Ichiro Onishi

A sample cartridge carrier apparatus is coupled with a focused ion beam processing apparatus (FIB processing apparatus). A guide mechanism is configured to guide a series of movements of a sample cartridge holder to allow a sample cartridge to be held by a carrier base on a sub stage. Sub cooling equipment is configured to cool the sample cartridge via the sub stage. A carrier mechanism carries the carrier base between the sub stage and a main stage.

Sample cartridge carrier apparatus and carrier base

A secondary storage container is a member which surrounds a primary storage container. A vaporized coolant generated in a primary storage space flows into and is stored in the secondary storage container. Radiant heat is blocked by the secondary storage container in a cooled state. Heat transferred to the primary storage container is reduced by a heat conducting path including the secondary storage container.

Cooling apparatus for charged particle beam device

A sample holder capable of limiting X-rays accepted into an X-ray detector is provided. The sample holder is for use in an electron microscope equipped with a polepiece assembly and a semiconductor detector. The sample holder includes: a sample stage on which a sample is held; and a shield plate. When the sample stage has been introduced in the sample chamber of the electron microscope, the shield plate is located between the polepiece assembly and the semiconductor detector.

Sample holder and electron microscope

There is provided a liner tube capable of reducing the effects of magnetic field variations on an electron beam. The liner tube () is disposed inside the electron optical column () of an electron microscope (). The interior of the tube () forms a path for the electron beam (EB). The liner tube () has a first cylindrical member () that is made of copper, gold, silver, or an alloy consisting principally of one of these metals.

Liner tube and electron microscope

A seat belt pretension with improved piston sealing performance. A piston has an expanding section formed at one end thereof contacting a force transmission component. When gas pressure resulting from reactive gas generated by a gas generator causes the piston to exert a pressing force on the force transmission component in the event of an emergency, the expanding section expands toward the inner circumferential surface of a pipe due to the gas pressure. As a result, the outer circumferential surface of the expanding section in the piston comes into contact with the inner circumferential surface of the pipe in a more efficient manner, resulting in enhanced sealing between the piston and the inner circumferential surface of the pipe. This prevents reactive gas from losing gas pressure, thereby allowing the gas pressure to more efficiently act on the piston.

Growing community of inventors

Tokyo, Japan

Masashi Shimizu