Jeol Ltd.

Sii Nanotechnology Inc.

Masashi Iwatsuki

Toshiaki Fujii

Tatsuya Adachi

Kiyoshi Miyashita

Kimio Ohi

Mikio Naruse

Kazuma Suzuki

Mike Hassel Shearer

The problem of the present invention is to provide a TEM sample equipped with an identifying function for easily specifying a detailed TEM sample and to provide a system for handling the management of information relating to the TEM sample using the TEM when making observations that is constructed with the FIB device manufacturing the sample. The TEM sample of the present invention is written with a mark encoding information specifying the sample at a specified location of a peripheral part. Information relating to the sample filed taking sample specifying information as an index is supplied to a TEM as associated matter. The sample working FIB device and observation TEM device of the present invention are provided with a function enabling writing of information relating to the sample and images to the file during operation which is then read out and utilized on a display.

TEM sample equipped with an identifying function, focused ion beam device for processing TEM sample, and transmission electron microscope

A scanning probe microscope having a tip, scanning piezoelectric units for causing the tip to scan and even-numbered z-movement piezoelectric elements for moving the tip along the z-axis. The electrodes at the outer faces of the z-movement piezoelectric elements are grounded. Thus, no AC coupling occurs between the tip and the z-axis electrode opposite to the tip. Introduction of noises into the resulting tunnel current is prevented and the image quality of the sample image is greatly improved.

Scanning probe microscope

A tip-scanning mechanism for use in a scanning tunneling microscope uses three drivers for driving a probe tip in three perpendicular directions. The drivers each consist of a piezoelectric element. In accordance with the invention, these three drivers are each shaped into a sheet, and the three sheets are stacked on top of each other. Two of the three drivers produce strains parallel to both faces of the drivers when a voltage is applied across the faces of each driver. Thus, rapid scans can be made without producing distortion.

Scanning device for scanning tunneling microscope

Growing community of inventors

Tokyo, Japan

Masashi Iwatsuki