Seiko Epson Corporation

Masashi Fujioka

Shuichi Kawano

Eiju Hirai

Ikuya Miyazawa

Isao Yanagisawa

Osamu Tonomura

A liquid discharge head includes a first substrate in which a nozzle is formed, a second substrate disposed above the first substrate, an energy generation element that generates energy for discharging a liquid by a drive signal being applied, and a vibration plate that vibrates by the energy generated by the energy generation element and that is stacked on the second substrate, in which the vibration plate has a first area and a second area positioned at a position different from the first area and having a lower elastic modulus than an elastic modulus of the first area.

Liquid discharge head, liquid discharge apparatus, and method of manufacturing liquid discharge head

In an MEMS device, in a Z direction that is a direction in which a first core portion, a plurality of first bump wiring, and a plurality of first individual wiring are laminated, a width between the first core portion and a wiring substrate is wider than a maximum particle diameter of solid particles contained in an adhesive, and a width between a first wiring and a second wiring and a width between a third wiring and a fourth wiring are wider than the maximum particle diameter of the solid particles.

MEMS device, liquid ejecting head, and liquid ejecting apparatus

A surface acoustic wave device includes: a sapphire substrate having a C-plane main surface; comb-like electrodes which excite surface acoustic waves formed on the main surface of the sapphire substrate; an aluminum nitride film which covers the comb-like electrodes and the main surface; and a silicon dioxide film which is formed on the surface of the aluminum nitride film.

Surface acoustic wave device, oscillator, module apparatus

A surface acoustic wave device includes: a sapphire substrate having a C-plane main surface; an aluminum nitride film which is formed on the main surface of the sapphire substrate; comb-like electrodes which are formed on the surface of the aluminum nitride film to excite surface acoustic waves; and a silicon dioxide film which covers the comb-like electrodes and the surface of the aluminum nitride film.

Growing community of inventors

Minowa-machi, Japan

Masashi Fujioka