Screen Holdings Co., Ltd.

Masashi Akita

Shinji Yamamoto

Hideji Naohara

Tetsuya Yamamoto

Shota Ueda

Anfen Ye

Display screen or portion thereof with transitional graphical user interface

A data processing method includes a sampling step of obtaining time series data based on a measurement result of a physical quantity in a substrate processing apparatus, an evaluation value calculation step of obtaining an evaluation value of the time series data by comparing the time series data with reference data, and a sampling period control step of controlling a sampling period used in the sampling step for each time series data. In the sampling period control step, all sampling periods are controlled to a normal period in an initial state, and when the evaluation value of the time series data is abnormal, the sampling period used when obtaining the time series data is controlled to an abnormal period shorter than the normal period.

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Kyoto, Japan

Masashi Akita