Panasonic Liquid Crystal Display Co., Ltd.

Hitachi, Ltd.

Japan Display Inc.

Hitachi Displays, Ltd.

Hitachi Device Engineering Co., Ltd.

Masaru Takabatake

Toshiki Kaneko

Hideo Tanabe

Atsushi Hasegawa

Hiroko Sehata

Tohru Sasaki

Makoto Tsumura

Masaaki Kitajima

Kenichi Onisawa

Takahiro Ochiai

Yoshiharu Nagae

Yuichi Hashimoto

Kenichi Cyahara

Kikuo Ono

Nobuyuki Suzuki

Masahiro Ishii

Masuyuki Ohta

Hideaki Yamamoto

Masahiro Yanai

Tetsuya Kawamura

Yuji Mori

Manabu Yamashita

Kenkichi Suzuki

Minoru Hiroshima

Masayoshi Suzuki

Takuya Takahashi

Ryoji Oritsuki

Katsumi Tamura

Jun-ichi Ohwada

Masatomo Terakado

Masaaki Matsuda

Kenichi Chahara

Hiroshi Yamate

Yuichi Harano

Hideaki Nakatsuka

Hayao Kozai

Yuuichi Harano

Toshikazu Horii

Takashi Isoda

Kazuhiro Ohhara

A LCD device having a large pixel holding capacitance includes opposedly facing first and second substrates, and liquid crystal between them. The first substrate includes a video signal line, a pixel electrode, a thin film transistor having a first electrode connected to the video signal line and a second electrode connected to the pixel electrode, a first silicon nitride film formed above the second electrode, an organic insulation film above the first silicon nitride film, a capacitance electrode above the organic insulation film, and a second silicon nitride film above the capacitance electrode and below the pixel electrode. A contact hole etched in both the first and second silicon nitride films connects the second electrode and the pixel electrode to each other. A holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.

Manufacturing method for liquid crystal display device

The present invention provides a liquid crystal display device having a large holding capacitance in the inside of a pixel. A liquid crystal display device includes a first substrate, a second substrate arranged to face the first substrate in an opposed manner, and liquid crystal sandwiched between the first substrate and the second substrate. The first substrate includes a video signal line, a pixel electrode, a thin film transistor having a first electrode thereof connected to the video signal line and a second electrode thereof connected to the pixel electrode, a first silicon nitride film formed above the second electrode, an organic insulation film formed above the first silicon nitride film, a capacitance electrode formed above the organic insulation film, and a second silicon nitride film formed above the capacitance electrode and below the pixel electrode. The second silicon nitride film is a film which is formed at a temperature lower than a forming temperature of the first silicon nitride film. The first silicon nitride film and the second silicon nitride film form a contact hole therein by etching both of the first silicon nitride film and the second silicon nitride film collectively by dry etching. The second electrode and the pixel electrode are connected to each other via the contact hole. A potential different from a potential applied to the pixel electrode is applied to the capacitance electrode, and a holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.

Manufacturing method of liquid crystal display device

To take measures against defects in the conduction by preventing shavings of the orientation film from getting into the terminal portion for liquid crystal display devices using an organic passivation film on a TFT substrate. Image signal linesextend to a terminal portion. The image signal lines, excluding the terminal portion, are covered with an inorganic passivation filmand an organic passivation film. In the terminal portion, terminal portion through holes are created in the organic passivation filmand the inorganic passivation film, in order to make electrical connection possible. The terminal portion is covered with an ITO filmin order to protect the video signal lines. The taper angle &#x3b8; in the organic passivation filmin the terminal portion through holes is 35 degrees or less, and the thickness of the organic passivation filmin the periphery of the terminal portion through holes is 300 nm to 600 nm, so that shavings of the orientation film can be prevented from getting into the terminal portion, and thus, defects in the conduction can be prevented.

Liquid crystal display device

A liquid crystal display device includes first and second opposed facing substrates and liquid crystal sandwiched therebetween. The first substrate includes a thin film transistor having a first electrode thereof connected to a video signal line and a second electrode thereof connected to a pixel electrode, a first silicon nitride film, an organic insulation film, a capacitance electrode, and a second silicon nitride film. The second silicon nitride film is formed at a temperature lower than a forming temperature of the first silicon nitride film. The second electrode and the pixel electrode are connected to each other via a contact hole formed by the first and second silicon nitride films. A potential different from a potential applied to the pixel electrode is applied to the capacitance electrode, and a holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.

In a liquid crystal display device disposed with reflective regions and transmissive regions, two organic insulating films are formed on a connection terminal portion and radial non-uniformities are prevented from occurring when applying the upper organic insulating film. Pixel portions including transmissive regions and reflective regions are formed, and a second organic insulating film is formed between a metal layer that forms reflective electrodes and a transparent conductive film that forms pixel electrodes to planarize concavo-convexities in the reflective electrodes. In contact holes of a connection terminal portion, the inclination of a first organic resin film is made smooth to control the occurrence of radial non-uniformities occurring in the second organic insulating film.

Display device

Growing community of inventors

Mobara, Japan

Masaru Takabatake