Toshiba Ceramics Co., Ltd.

Masaru Seino

Jun Yoshikawa

Eiichi Toya

Hideo Nakanishi

Takashi Tanaka

Kazunori Meguro

Yoshiyuki Watanabe

Atsuo Kitazawa

Tatsuo Nozawa

Yutaka Ishizuka

A vertical boat for holding a plurality of semiconductor wafers comprising two end members (2) positioned at the top and the bottom of the vertical boat, and a plurality of support members (3,4,5,6,104) vertically mounted on the end members (2) for supporting the wafers, wherein each support member (3,4,5,6,104) is formed by a plate-like member having a series of slits (9,10,7,8,108) formed thereon in such a manner that a plurality of support arms are defined by the slits (9,10,7,8,108) at a predetermined interval, each support arm having a support projection (11,12,13,14,112) formed at the end thereof, and wherein the inner portions (P) of the wafer (1) is to be supported by the support projections (11,12,13,14,112) whereas the periphery of the wafer (1) does not contact the arms of the support members (3,4,5,6,104). The slits can be formed in two steps: forming a series of first slit portions on the plate-like member at a predetermined interval so as to retain two side walls of the plate-like member; and forming a series of second small slit portions on one of the side walls at the same interval so as to connect each second slit portion to the corresponding first slit portion.

Vertical boat and a method for making the same

Growing community of inventors

Okitama, Japan

Masaru Seino