Ebara Corporation

Masaru Nakaniwa

Hiroyuki Shinozaki

Norio Kimura

Takeshi Murakami

Yukio Ikeda

Satoshi Mori

Masayoshi Hirose

Katsuyuki Aoki

Kiwamu Tsukamoto

Masao Matsumura

Yoichi Kanemitsu

Yuji Shirao

Katsuaki Usui

Fumio Kondo

Tetsuma Ikegami

Takeshi Yoshioka

Yasuhiro Niimura

Masaaki Kajiyama

Naoya Hanafusa

Masato Eguchi

Noriyuki Takeuchi

Kinnosuke Ishibashi

Takanori Shiozuka

Kouichi Umezawa

A thin-film vapor deposition apparatus has a reaction casing defining a reaction chamber, a stage for supporting a substrate, the stage being disposed in the reaction chamber, and a shower head supported on the reaction casing in confronting relation to the stage for discharging a material gas toward the substrate on the stage for depositing a thin film on the substrate. A plurality of flow path systems are disposed in various regions of the shower head and the reaction casing for passage therethrough a heating medium to control the temperatures of the regions under the control of a temperature controller.

Thin-film vapor deposition apparatus

A rotor with lobes for use in a turbomachine having a rotation shaft is disclosed. The rotor comprises a rotor shell having a shell member, which is made of a sheet strip metal and having profile curvatures to conform to a required shape of the lobe of the rotor, and a connecting portion for connecting the rotor to the rotation shaft. By making a rotor from a sheet strip metal through bending process to form a rotor shell, a rotor having thin walls can be produced efficiently and economically to provide a light weight rotor of reduced inertial moment so that the startup process or shut down process can be performed quickly.

Turbo machine rotor made of sheet metal

A trap for collecting solid is connected to either an exhaust port or a suction port of a vacuum pump for trapping a solid material separated from a sublimed gas discharged by the vacuum pump. The trap includes a casing, a passage defining member disposed in the casing and defining a gas passage in the casing, and an intermediate member disposed between the casing and the passage defining member. The intermediate member is made of a flat thin sheet which is formed into a tubular member, and the tubular member is capable of being spread when taken out from the casing.

Trap for collecting solid

Magnetic levitation conveyor apparatus

Growing community of inventors

Ebina, Japan

Masaru Nakaniwa