Seiko Instruments Inc

Masaru Matsuyama

Satoshi Shimizu

Susumu Takigawa

A method of manufacturing a piezoelectric vibrator comprises forming a gettering metal film on a surface of a piezoelectric vibrator piece and forming a frequency-adjusting weight, separate from the gettering metal film, on the piezoelectric vibrator piece. The piezoelectric vibrator piece is then placed in a hermetic container after which the hermetic container is hermetically sealed. A laser beam is irradiated on the metal film to heat the same to getter gas contained inside the hermetic container, and after completion of gettering, the laser beam is irradiated on the frequency-adjusting weight to adjust the frequency of vibration of the piezoelectric vibrator piece.

Method of manufacturing a piezoelectric vibrator

A piezoelectric vibrator has an airtight terminal including leads each having a plane portion. A vibrating piece includes a first part having a preselected thickness and a second part having a thickness smaller than the preselected thickness. The plane portion of each of the leads is connected to the second part of the vibrating piece. A case covers a periphery of the vibrating piece and is sealed on an outer circumference of the airtight terminal.

Piezoelectric vibrator, surface-mounting type piezoelectric vibrator, oscillator, electronic apparatus and wave clock

A method of manufacturing a piezoelectric vibrator comprises providing a piezoelectric vibrator piece inside a hermetic container. A gettering metal film is formed inside the hermetic container on an inner surface of the container or on a surface of the piezoelectric vibrator piece, and a weight is formed separate from the metal film on the piezoelectric vibrator piece. A laser beam is irradiated on the metal film to heat the same to getter gas contained inside the hermetic container, and after completion of gettering, the laser beam is irradiated on the weight to adjust the frequency of vibration of the piezoelectric vibrator piece.

A piezoelectric vibrator has a container having a hermetically sealed cavity and a transparent portion for transmitting therethough a laser beam into the hermetically sealed cavity. A piezoelectric vibrator piece is disposed in the hermetically sealed cavity. A gettering substance is disposed directly on a surface of the piezoelectric vibrator piece so that when a laser beam is irradiated on the metal film through the transparent portion of the container the metal film is vaporized to absorb any gases contained in the hermetically sealed cavity of the container to thereby increase a degree of vacuum within the hermetically sealed cavity.

Piezoelectric vibrator and manufacturing method thereof

A piezoelectric vibrator has a piezoelectric vibrating piece having a base portion, a free end, and an intermediate portion disposed therebetween. Each of a pair of covers has a main surface and at least two recesses formed in the main surface. The covers are connected together so that the recesses of the covers form a hermetically sealed cavity into which the piezoelectric vibrating piece of the piezoelectric vibrating plate extends in a state in which the piezoelectric vibrating piece is capable of undergoing oscillating movement. The recesses of each of the covers extend to different depths from the main surface thereof so that during oscillating movement of the piezoelectric vibrating piece, the free end of the piezoelectric vibrating piece is prevented from contacting any one of the covers by contact between the intermediate portion of the piezoelectric vibrating piece and the main surface of the one cover.

Growing community of inventors

Tochigi, Japan

Masaru Matsuyama