Shin-Etsu Polymer Co., Ltd.

Masaru Hagano

Hiroshi Mimura

Katsuhiko Kato

Akihiro Hasegawa

Sayo Tajika

According to one embodiment, a substrate storage container comprises: a container body configured to store a substrate; a lid that closes a rectangular opening of the container body; and an annular gasket located between the container body and the lid. The container body has at least either one of a guide rib or a guide slit in an opening portion around the opening. The lid has at least either one of a guide slit or a guide rib that is engageable with the guide rib or the guide slit of the container body. The guide rib and the guide slit engage each other when the opening is closed with the lid and prevent the lid from tilting at a predetermined tilt angle or more with respect to an opening surface where the opening is formed.

Substrate storage container

[Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section. [Solution] The present invention relates to a substrate storage container () that is provided with: a container main body (), which stores a substrate (W), and which has at least one side open; and a removable cover body () capable of opening/closing an opening () of the container main body (). In the substrate storage container (), the inside of the container main body () is provided with a first holding section () having a first holding groove () for holding a rear portion of the substrate (W), the inner side of the cover body () is provided with a second holding section () having a second holding groove () for holding a front portion of the substrate (W), and at least the first holding groove () of the first holding section () is configured from an alloy resin having a polycarbonate resin and a polybutylene terephthalate resin as main components.

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Itoigawa, Japan

Masaru Hagano