Hitachi, Ltd.

Unisia Jecs Corporation

Hitachi Unisia Automotive, Ltd.

Masao Tsukada

Koichi Kusuyama

Akira Uchikawa

Hiroshi Aoi

Naoki Tomisawa

Shoichi Sakai

Futoshi Ichiyanagi

Masami Kawashima

Keiji Mori

Syoichiro Yokota

An oxygen sensor includes a sensing element detecting an oxygen concentration in a measurement gas that flows in a pipe, a cylindrical protector which covers an outside of the sensing element and whose top end portion projects toward an inside of the pipe. An outside diameter D of the protector and a projection amount L of the protector inside the pipe are set so that a ratio of the product of the outside diameter D and the projection amount L (D&#xd7;L) to a cross-sectional area S of a flow passage of the pipe becomes substantially smaller than or equal to 2.5%.

Oxygen sensor

An oxygen sensor includes a tubular casing; an oxygen detecting element installed in a leading end of the tubular casing; lead wires each extending from the oxygen detecting element to the outside of the tubular casing through an open base end of the tubular casing, each lead wire including a core wire of metal; a rubber bush plugged in the open base end of the tubular casing, the rubber bush having the lead wires passed therethrough; and a heat resisting structure for protecting the rubber bush from a high temperature. The heat resisting structure is constructed to satisfy the following inequality:10%&#x2266;50%,

A bonding pad for outputting an output of a piezoresistive element to an integrated circuit is disposed on one side of a sensor substrate, and the sensor substrate is adhered to a package at only a rear side of the bonding pad.

Pressure sensor and manufacturing method of pressure sensor

A sensing device of the present invention includes a first resistive branch having first and second resistors connected in series, a second resistive branch comprising third and fourth resistors connected in series and arranged in parallel with the first resistive branch to form a bridge circuit, first and second feed wiring arrangements connecting the first and second resistive branches to a power source side, respectively, in parallel to each other, and a ground wiring arrangement connecting the first and second resistive branches to a ground side.

Sensing device

In a pressure sensor in which a frame shaped protruding potion is formed on a surface side of a substrate by means of an etching process, and a blocking plate is connected to an upper part of the protruding portion, to form a standard pressure chamber, a recess is formed on at least one of the substrate and the blocking plate that constitute the standard pressure chamber, to increase the height of the standard pressure chamber, thereby preventing the lowering of pressure detection accuracy due to foreign substances within the standard pressure chamber.

Pressure sensor and method of manufacturing pressure sensor

A pressure sensor including a substrate having a diaphragm portion. A diaphragm-defining recess is recessed inwardly from one surface of the substrate to define the diaphragm portion between a bottom surface of the recess and an opposite surface of the substrate. A recess is disposed within the diaphragm portion. A pressure sensitive arrangement is disposed in the substrate, a detector portion of which is disposed within the recess formed within the diaphragm portion.

Pressure sensor structure

In an apparatus for detecting airflow quantity applicable to a vehicular internal combustion engine, a slit is formed so that an insulating substrate is partitioned into a main substrate portion and a sub substrate portion. A first temperature sensitive resistor, a heat generated main resistor 31, and a second temperature sensitive resistor are formed on the main substrate portion in film forms in the order with respect to the forward air stream direction (A). A difference in the resistance values of the first and second temperature sensitive resistors 32 and 33 detects the air stream direction and detects the flow quantity according to a temperature variation (namely, the variation in resistance value) in the heat generated temperature sensitive main resistor due to the cooling caused by the intake air.

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Atsugi, Japan

Masao Tsukada