Kawasaki Jukogyo Kabushiki Kaisha

Masao Takatori

Yasuhiko Hashimoto

Masayuki Enomoto

Jun Fujimori

Kenji Noguchi

Yasuo Hirooka

Yohichi Nakamura

Shohei Mase

A robot system including a robot, a marker unit, a sensor, storage device, and a control device. The robot performs an operation with regard to a workpiece. The marker unit is attached to a measurement object and includes a base section and a plurality of markers attached to the base section. The sensor detects identification information and three-dimensional positions of the plurality of markers. The storage device stores teaching data including operation data and attachment position data indicating a correspondence relationship between the identification information of each of the markers and an attachment position of the corresponding marker. The control device calculates a three-dimensional position of the measurement object based on the three-dimensional positions of the plurality of markers and the attachment position data and controls the robot based on the three-dimensional position of the measurement object and the operation data so as to make the robot perform the operation.

Operation system

The substrate detection apparatus includes: a collimating reflector located on one side of substrates; an illumination unit configured to radiate light in a planar state toward the collimating reflector such that edge portions of the substrates are located in an optical path of the light; an image acquiring unit configured to acquire a passing light image including the edge portions formed on the collimating reflector with the light radiated in the planar state from the illumination unit; and an image processing unit configured to process the passing light image obtained by the image acquiring unit, thereby detecting the conditions of the substrates.

Apparatus and method for detecting substrates

In the present invention, a baseof a robotis fixed to a fixing portionof a frame divided bodyThe baseallows force exerted from a robot main bodyA to be transmitted to the fixing portionof the frame divided bodyContrary, the fixing portionof the frame divided bodyhas rigidity which can prevent the force exerted from the baseof the robotfrom being transmitted to a main body constituting memberAccordingly, the baseof the robothas only to possess a function for connecting the robot main bodyA and the frame divided bodyTherefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided bodycan be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.

Carrier unit of substrate transfer apparatus

In this invention, a movable body movable in forward and backward directions and a connector fixed to an opener-side door are connected with each other by link members so as to constitute a parallel link mechanism, such that they can be angularly displaced relative to each other. Link member angular displacement means controls the angular displacement of each link member relative to the movable body to be in a predetermined angular position, corresponding to the position of the movable body along the forward and backward directions. Reciprocation of the movable body in the forward and backward directions by movable body drive means moves the opener-side door in the forward and backward directions as well as in the upward and downward directions, thereby opening an opener-side opening. Since the movable body is moved only in the forward and backward directions, and necessity of moving and guiding the movable body in the upward and downward directions can be eliminated, the substrate container opener can be downsized, and a space provided below a FOUP supporting portion can be utilized effectively.

Growing community of inventors

Kobe, Japan

Masao Takatori