Sumitomo Chemical Company, Limited

Masao Morikawa

Yutaka Shiomi

Yasuhiro Miura

Masaaki Toma

Akira Morisaki

Yoshio Iino

Yoji Matsuda

Method of cleaning interior of container, and apparatus therefor

A liquid filtering and supply system according to the present invention comprises, a main line to connect a liquid introducing part to a liquid supplying part, a filter disposed in said main line to filter said liquid, a first pressure detector disposed in said main line at an upstream side of said filter to detect a pressure of said liquid before said liquid is introduced to said filter, a second pressure detector disposed in said main line at a downstream side of said filter to detect a pressure of said liquid after said liquid passed out of said filter, a first circulating line for returning a liquid in said main line to the liquid introducing part, a pressure difference computing element to determine a pressure difference between the first pressure detector and said second pressure detector, a control valve disposed in the first circulating line, and a controlling part to adjust an opening of said control valve, based on a signal of the pressure difference transmitted from the pressure difference computing element.

Liquid filtering and supply system controlling recirculation responsive

The present invention provides a method of measuring particles and an apparatus for the same, which count only particles in liquid by distinguishing between the particles and bubbles in liquid. In order to fulfill the above requirements, in the present invention, liquid to be measured flows through a flow cell at a fixed flow rate, and a laser beam is irradiated thereto. Scattering light is generated when particles and bubbles pass through a laser beam irradiation region, and the scattering light is converted into a pulse signal by a photoelectric converter. In the pulse signals, a pulse signal having a pulse width of 100 .mu.S is regarded as corresponding to light scattered by a bubble, which is omitted from the number of pulse signals. Thus, only a pulse signal corresponding to light scattered by a particle in liquid can be measured.

Method of measuring particles and apparatus for the same

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Sodegaura, Japan

Masao Morikawa