Tel-varian Limited

Tokyo Electron Kabushiki Kaisha

Masao Kubodera

Masaki Narushima

Masahito Ozawa

Shigeru Kasai

Sumi Tanaka

Tomihiro Yonenaga

Hiromi Kumagai

Masami Mizukami

Hatsuo Osada

Masanobu Kanazashi

Toshihiko Takasoe

A cassette carrier unit for carrying a cassette, in which a plurality of substrates are housed, into and out of cassette chambers of the multi-chamber system including a hand on which the cassette is mounted. A multi-joined arm for supports the swingable hand, and a base supports the multi-joined swingable arm. The multi-joined arm includes a first shaft member rotatably attached to the hand, a second shaft member rotatably attached to the base, a third shaft member rotated associating with the first shaft member but in a direction reverse to the direction in which the first shaft member is rotated, and a fourth shaft member rotatably attached to the base and to which rotation drive force is transmitted. A first arm is rotatably attached to the first shaft member at the front end thereof and to the second shaft member at the base end thereof. A second arm is arranged substantially parallel to the first arm and fixed to the third shaft member at the front end thereof and to the fourth shaft member at the base end thereof. When the first and second arms are swung, the hand is swung in a direction reverse to the direction in which the first and second arms are swung.

Multi-chamber system provided with carrier units

A semiconductor processing apparatus comprises a vacuum processing chamber and a lamp house provided thereunder. A susceptor is provided in the processing chamber, and a semiconductor wafer is mounted thereon. The processing chamber and the lamp house are partitioned by a widow plate made of quartz glass in an airtight state. Eight light sources for heating are arranged in a circumferential form on a rotatable table at the portion which is in the lamp house and under the window plate. A sensor comprising a thermocouple for detecting energy of transmitted light is provided between the susceptor and the window plate. The sensor is connected to a measuring section comprising an A/D converter, and thereby detected data is converted from a digital signal to an observed value. The observed value is sent to a comparator to be compared with a predetermined reference model. A comparative result obtained by the comparator is transmitted to a controlling section. The control section induces the state of the window plate from the comparative result, and stops the power supply to the light source when the detected energy of the transmitted light is lower than a predetermined limit.

Semiconductor processing apparatus

The present invention relates to a surface processing apparatus which performs heating processing of an object of heating which is mounted on a mounting device provided inside a process container, and which includes a plural number of lamps provided so as to oppose a rear surface of a processing surface of an object of processing, a rotating unit which has the plural number of lamps mounted to it in a ring shape, and a drive unit which drives the rotating unit. Also, the present invention relates to a processing apparatus for leading a process gas from a gas supply tube to a gas chamber partitioned inside a process container, and which blows process gas from an outlet of the gas chamber and onto an object of processing which is mounted on a mounting device provided inside the process container, and which includes a plural number of partition plates each provided with a plural number of through holes, being provided at required intervals in a direction of gas flow and inside the gas chamber.

Surface processing apparatus

Growing community of inventors

Yamanashi, Japan

Masao Kubodera