Hitachi, Ltd.

Hitachi Vlsi Engineering Corp.

Hitachi Microcomputer Engineering, Ltd.

Masanori Tazunoki

Toshiyuki Sakuta

Hisashi Nakamura

Kazuya Ito

Masamichi Ishihara

Kanji Otsuka

Hidetoshi Iwai

Masao Kawamura

Makoto Homma

Shigeo Kuroda

Kunizo Sahara

Hinoko Kurosawa

Toshihiko Satoh

Minoru Enomoto

Keiji Sasaki

Hiromitsu Mishimagi

Yutaka Ito

Hiroyuki Uchiyama

Ryoichi Hori

Yasushi Takahashi

Toshio Sasaki

Kazuyoshi Oshima

Kazuyuki Miyazawa

Toshitsugu Takekuma

Yasuhiro Kasama

Shinji Udo

Eiji Miyamoto

Hiromi Matsuura

Toshio Maeda

Osamu Sakai

Shigetoshi Sakomura

Wataru Arakawa

A dynamic RAM provided with a data retention mode intended for low power consumption is provided. In the data retention mode, the current supply capabilities of voltage generation circuits which generate decreased voltage, increased voltage, reference voltage, etc., are limited in the range in which information retention operation in memory cells can be maintained, and the number of selected memory mats in the data retention mode is increased with respect to that of memory mats selected in the normal read/write mode and refresh mode. Special modes such as the data retention mode are set by combining an address strobe signal and other control signals and dummy CBR refresh is executed to release the special mode.

Special mode control method for dynamic random access memory

To achieve higher packaging density and one wafer level for a full-sized wafer memory, or wafer-scale integration memory system, the wafers are vertically stacked with each other at a predetermined interval. A packaging technique is improved in such a way that a memory system layout can be precisely realized and a precise through hole can be formed. Moreover, other chips are fixed on the wafer so as to achieve furthermore the high packaging density.

Wafer scale or full wafer memory system, packaging method thereof, and

A semiconductor integrated circuit memory structure is provided which uses macro-cellulated circuit blocks that can permit a very large storage capability (for example, on the order of 64 Mbits in a DRAM) on a single chip. To achieve, this, a plurality of macro-cellulated memory blocks can be provided, with each of the memory blocks including a memory array as well as additional circuitry such as address selection circuits and input/output circuits. Other peripheral circuits are provided on the chip which are common to the plurality of macro-cell memory blocks. The macro-cell memory blocks themselves can be formed in an array so that their combined storage capacity will form the large overall storage capacity of the chip. The combination of the macro-cell memory blocks and the common peripheral circuitry for controlling the memory blocks permits a faster and more efficient refreshing operation for a DRAM. This is enhanced by a LOC (Lead On Chip) arrangement used in conjunction with the memory blocks.

Semiconductor integrated circuit device having a plurality of memory

Wafer scale of full wafer memory system, packaging method thereof, and

This invention discloses a semiconductor device, and method of manufacturing such device, which provides a high degree of moistureproofing, provides a high production yield, and in which defective elements can be replaced by the use of fuses. A circuit test of the device is conducted while at least part of each of a fuse and a bonding pad is exposed through a first passivation film covering a semiconductor substrate on which circuit elements such as MISFETs and capacitors are formed, and any defective elements are replaced by the use of fuses. Contamination of and damage to the elements during the test can thus be prevented. Thereafter, a second passivation film is formed so as to cover all the essential portions of the fuses and bonding pads. The exposure of cracks in the fuses and bonding pads is thus prevented, and the invasion of moisture, etc., into the lower layers below the fuses and bonding pads is also prevented, thereby improving the moistureproofing and reliability of the device.

Method of manufacture of a semiconductor device

Growing community of inventors

Hamura, Japan

Masanori Tazunoki