National Institute of Advanced Industrial Science and Technology

Japan As Represented by Director General of Agency of Industrial Science

Director-general of Agency of Industrial Science and Technology

Masanori Tamura

Akira Sekiya

Hiroyasu Ishida

Heng-dao Quan

Hengdao Quan

The present invention provides a method for inexpensively, efficiently, safely, and continuously producing COF, without using highly toxic raw materials such as phosgene or difficult-to-get raw materials, with no risk of explosion or the like. Tetrafluoroethylene gas and oxygen gas are introduced into a reactor, and they are then heated in a gas phase in the absence of nitrogen gas for reaction, so as to produce carbonyl fluoride. The reactor is preferably a tubular reaction tube. As such tetrafluoroethylene gas, unpurified or purified tetrafluoroethylene gas obtained by heating HCFC-22 gas for thermal decomposition can be used. According to the present invention, COFthat is useful as cleaning gas for CVD devices (chemical vapor deposition method) can be inexpensively, efficiently, and safely produced.

Process for production of carbonyl fluoride

A porous aluminum fluoride on which SbClF(wherein x represents a numeral of 0 to 5) is supported, SbClFbeing obtainable by supporting SbCl, or the like on a porous aluminum fluoride and treating it with hydrogen fluoride. The resulting porous aluminum fluoride has a high activity as a fluorinating agent, a fluorination catalyst, or the like, is easy to handle, can be used for a flow-type reaction, and also can be used even at a high temperature.

Porous aluminum fluoride

A novel fluorine-containing polymeric compound represented by the general formula

Fluorine-containing polymeric compound and a method for the preparation

Fluorine-containing polymeric compound and method for the preparation

Growing community of inventors

Tsukuba, Japan

Masanori Tamura